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公开(公告)号：SG193874A1
公开(公告)日：2013-10-30
申请号：SG2013067939
申请日：2009-09-10
Applicant: RUDOLPH TECHNOLOGIES INC
Inventor： DOE RODNEY , STROM JOHN T
Abstract: Abstract PROBE MARK INSPECTIONProbe mark inspection involves a recipe based on unique image characteristics or combinations of unique image characteristics. Result images are correlated with a reference created to determine which image characteristic or combination of image characteristics provides an improved contrast.Figure 5b
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