公开(公告)号：JP2010038923A

公开(公告)日：2010-02-18

申请号：JP2009213805

申请日：2009-09-15

Applicant: Rudolph Technologies Inc ,  ルドルフテクノロジーズ インコーポレイテッドRudolph Technologies, Inc.

Inventor： SNOW DONALD B ,  STROM JOHN T ,  KRAFT RAYMOND H

IPC: G01B11/00 ,  G01B11/03 ,  G01B11/245 ,  G01B11/25 ,  G01C11/06 ,  H01L21/66 ,  H05K13/00

CPC classification number: G01B11/254 ,  G01B11/245 ,  G01C11/06 ,  G06T7/521 ,  H05K13/0015

Abstract: PROBLEM TO BE SOLVED: To provide a preferable stereoscopic three-dimensional optical measurement system and a method. SOLUTION: A stereoscopic three-dimensional optical measurement system (100) and a method accurately measure the location of physical features (129) on a test article (120) in a manner that is fast and robust relating to surface contour discontinuities. A test article (120) can be imaged from two or more perspectives through a substantially transparent fiducial plate (190) bearing a fiducial marking (199) so that cameras (111, 112) viewing angles and apparent relative distances between a feature on a test article (120) and one or more fiducials (199) may enable accurate calculation of feature position. COPYRIGHT: (C)2010,JPO&INPIT

Abstract translation: 要解决的问题：提供优选的立体三维光学测量系统和方法。 解决方案：立体三维光学测量系统（100）和方法以与表面轮廓不连续性相关的快速且鲁棒的方式精确地测量测试物品（120）上的物理特征（129）的位置。 测试物品（120）可以从两个或多个透视图通过具有基准标记（199）的基本上透明的基准板（190）成像，使得相机（111,112）的视角和测试中的特征之间的明显的相对距离 物品（120）和一个或多个基准（199）可以使得能够精确地计算特征位置。 版权所有（C）2010，JPO＆INPIT

公开(公告)号：DE60236019D1

公开(公告)日：2010-05-27

申请号：DE60236019

申请日：2002-12-18

Applicant: MARINER ACQUISITION CO LLC ,  RUDOLPH TECHNOLOGIES INC

Inventor： SNOW DONALD B ,  STROM JOHN T ,  KRAFT RAYMOND H

IPC: G01B11/00 ,  G01B11/14 ,  G01B11/03 ,  G01B11/245 ,  G01B11/25 ,  G01C11/06 ,  H01L21/66 ,  H05K13/00

Abstract: A stereoscopic three-dimensional optical metrology system and method accurately measure the location of physical features on a test article in a manner that is fast and robust to surface contour discontinuities. Disclosed embodiments may image a test article from two or more perspectives through a substantially transparent fiducial plate bearing a fiducial marking; camera viewing angles and apparent relative distances between a feature on a test article and one or more fiducials may enable accurate calculation of feature position.

公开(公告)号：SG193874A1

公开(公告)日：2013-10-30

申请号：SG2013067939

申请日：2009-09-10

Applicant: RUDOLPH TECHNOLOGIES INC

Inventor： DOE RODNEY ,  STROM JOHN T

Abstract: Abstract PROBE MARK INSPECTIONProbe mark inspection involves a recipe based on unique image characteristics or combinations of unique image characteristics. Result images are correlated with a reference created to determine which image characteristic or combination of image characteristics provides an improved contrast.Figure 5b