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公开(公告)号：SG11201408664YA
公开(公告)日：2015-01-29
申请号：SG11201408664Y
申请日：2013-06-27
Applicant: RUDOLPH TECHNOLOGIES INC
Inventor： STEFANCZYK WOJCIECH , KANE JAMES FRANCIS , COLGAN MICHAEL , ABONDOLO JAMES
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