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公开(公告)号：SG192203A1
公开(公告)日：2013-09-30
申请号：SG2013057682
申请日：2012-01-27
Applicant: RUDOLPH TECHNOLOGIES INC
Inventor： MEHENDALE MANJUSHA , KOTELYANSKII MICHAEL , MUKUNDHAN PRIYA , COLGAN MICHAEL , ZHOU WEI
Abstract: An automatically adjustable method for use in opto-acoustic metrology or other types of metrology operations is described. The method includes modifying the operation of a metrology system that uses a PSD style sensor arrangement. The method may be used to quickly adjust the operation of a metrology system to ensure that the data obtained therefrom are of the desired quality. Further, the method is useful in searching for and optimizing data that is or can be correlated to substrate or sample features or characteristics that of interest. Apparatus and computer readable media are also described.
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公开(公告)号：SG11201408664YA
公开(公告)日：2015-01-29
申请号：SG11201408664Y
申请日：2013-06-27
Applicant: RUDOLPH TECHNOLOGIES INC
Inventor： STEFANCZYK WOJCIECH , KANE JAMES FRANCIS , COLGAN MICHAEL , ABONDOLO JAMES
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