公开(公告)号：WO1998002716A1

公开(公告)日：1998-01-22

申请号：PCT/US1997010833

申请日：1997-06-19

Applicant: ROBOTIC VISION SYSTEMS, INC.

Inventor： ROBOTIC VISION SYSTEMS, INC. ,  LIU, Kuo-Ching ,  LIANG, Chu-Kwo ,  FWU, Jong-Kae ,  HUANG, Chung-Po

IPC: G01B11/03

CPC classification number: G01B11/002

Abstract: A system is provided that simultaneously gathers three-dimensional and two-dimensional data for use in inspecting objects such as chip carriers for defects. Specifically, a source laser beam (303) is directed to an object and forms a spot (305) at the point of impingement at a known X-Y position on the object. The laser beam is reflected at the spot and light reflected off-axially (306, 307) with respect to the source laser beam (303) is detected by two position sensing detectors (PSDs) (310, 311). Simultaneous to detecting off-axially reflected light, retro-reflected light (i.e., the light reflected approximately co-axial with the source laser) is detected by a photo diode array (313). Three dimensional object information is determined from the position sensing detector (310, 311) signals and two-dimensional object information is determined from the photo diode array (313) signal.

Abstract translation: 提供了一种同时收集三维和二维数据以用于检查诸如用于缺陷的芯片载体的物体的系统。 具体地，源激光束（303）被引导到物体，并且在物体上的已知X-Y位置处的冲击点处形成点（305）。 激光束在点处被反射，并且通过两个位置感测检测器（PSD）（310,311）检测相对于源激光束（303）离轴（306,307）反射的光。 同时检测离轴反射光，通过光电二极管阵列（313）检测回射反射光（即，与源激光大致同轴反射的光）。 从位置检测检测器（310,311）确定三维物体信息，并根据光电二极管阵列（313）信号确定二维物体信息。

公开(公告)号：WO2000075713A1

公开(公告)日：2000-12-14

申请号：PCT/US2000/015623

申请日：2000-06-07

Applicant: ROBOTIC VISION SYSTEMS, INC.

Inventor： LIU, Kuo-Ching

IPC: G02B26/10

CPC classification number: G01B11/002 ,  G01B11/245 ,  G01N21/8806 ,  G01N21/8851 ,  G01N21/95684 ,  G01N2021/95661

Abstract: A system and method are disclosed for highly efficient imaging of selected object features utilizing, in combination, a 2D imaging subsystem (100) and a 3D imaging subsystem (110) wherein data from the 2D imaging subsystem (100) is used to predetermine areas containing 3D features of interest such that delay attributable to imaging of areas of non-interest for 3D features is minimized.

Abstract translation: 公开了一种利用组合2D成像子系统（100）和3D成像子系统（110）对所选对象特征进行高效成像的系统和方法，其中来自2D成像子系统（100）的数据用于预先确定包含 感兴趣的3D特征使得归因于3D特征的不感兴趣的区域的成像的延迟最小化。

公开(公告)号：EP1095305A1

公开(公告)日：2001-05-02

申请号：EP99955545.1

申请日：1999-06-09

Applicant: Robotic Vision Systems Inc.

Inventor： LIU, Kuo-Ching

IPC: G02B27/10

CPC classification number: G02B27/1093 ,  G02B27/106

Abstract: A diffracting beam splitter splits an optical beam. The resulting beams are swept over an object by a beam deflector. The beams are mechanically scanned transverse to the beam deflection direction. A position sensitive device receives light reflected from the incident beams and a three dimensional profile of the object is produced.

公开(公告)号：EP0979386B1

公开(公告)日：2006-08-02

申请号：EP97931329.3

申请日：1997-06-19

Applicant: Robotic Vision Systems Inc.

Inventor： LIU, Kuo-Ching ,  LIANG, Chu-Kwo ,  FWU, Jong-Kae ,  HUANG, Chung-Po

IPC: G01B11/03 ,  G01B11/08 ,  G06T5/40 ,  G01B11/00 ,  G01B11/02 ,  G01B11/24

CPC classification number: G01B11/002

Abstract: A system is provided that simultaneously gathers three-dimensional and two-dimensional data for use in inspecting objects such as chip carriers for defects. Specifically, a source laser beam (303) is directed to an object and forms a spot (305) at the point of impingement at a known X-Y position on the object. The laser beam is reflected at the spot and light reflected off-axially (306, 307) with respect to the source laser beam (303) is detected by two position sensing detectors (PSDs) (310, 311). Simultaneous to detecting off-axially reflected light, retro-reflected light (i.e., the light reflected approximately co-axial with the source laser) is detected by a photo diode array (313). Three dimensional object information is determined from the position sensing detector (310, 311) signals and two-dimensional object information is determined from the photo diode array (313) signal.

公开(公告)号：EP1266203A1

公开(公告)日：2002-12-18

申请号：EP01913348.7

申请日：2001-03-07

Applicant: Robotic Vision Systems Inc.

Inventor： LIU, Kuo-Ching ,  REVEN, Shawn

IPC: G01N21/00 ,  G01N21/25

CPC classification number: G01N21/6456 ,  G01N21/6447 ,  G01N21/94 ,  G01N2021/646 ,  G01N2021/8822 ,  G01N2201/0634 ,  G02B21/16

Abstract: A system for imaging an object is described. The system includes a light source (200) for illuminating the object (210) with light, the light from the light source (200) having a first wavelength. The system further includes an image capturing device (240) and a filter device (220). The filter device (220) is transmissive for light having a wavelength which is different than the first wavelength, and reflective for light having the first wavelength, the image capturing device (240) capturing an image of at least a portion of the object (210) using light transmitted through the filter device (220). The system may further include a dark field illumination system (400) for illuminating the object (210) either simultaneously with the illumination by the first light source (200), or sequentially with respect to the illumination by the first light source (200).

Abstract translation: 描述了用于对物体成像的系统。 该系统包括用光照射物体（210）的光源（200），来自光源（200）的光具有第一波长。 该系统还包括图像捕捉设备（240）和过滤设备（220）。 所述滤光装置（220）对于具有不同于所述第一波长的波长的光是可透射的，并且对于具有所述第一波长的光是反射的，所述图像捕获装置（240）捕获所述物体（210）的至少一部分的图像 ）使用透过滤光器装置（220）的光。 该系统还可以包括暗场照明系统（400），用于或者与第一光源（200）的照射同时或者相对于第一光源（200）的照射来照射物体（210）。

公开(公告)号：EP1210638A1

公开(公告)日：2002-06-05

申请号：EP00936499.3

申请日：2000-06-07

Applicant: Robotic Vision Systems Inc.

Inventor： LIU, Kuo-Ching

IPC: G02B26/10 ,  G01B11/03

CPC classification number: G01B11/002 ,  G01B11/245 ,  G01N21/8806 ,  G01N21/8851 ,  G01N21/95684 ,  G01N2021/95661

Abstract: A system and method are disclosed for highly efficient imaging of selected object features utilizing, in combination, a 2D imaging subsystem (100) and a 3D imaging subsystem (110) wherein data from the 2D imaging subsystem (100) is used to predetermine areas containing 3D features of interest such that delay attributable to imaging of areas of non-interest for 3D features is minimized.

公开(公告)号：EP1060432A1

公开(公告)日：2000-12-20

申请号：EP99905800.1

申请日：1999-02-05

Applicant: Robotic Vision Systems Inc.

Inventor： STERN, Howard ,  LIU, Kuo-Ching ,  BLOSSER, Robert, C.

IPC: G02B26/10 ,  G01B11/00 ,  G01N21/00

CPC classification number: G01B11/00 ,  G01N21/88 ,  G02B26/10

Abstract: A system and method for correcting a scan pattern of a moving optical scanning system (110) that scans an object or pattern (130). A gantry (120) moves the optical system at a constant rate in a first direction. Using a light source and a first deflector, the scanning system quickly sweeps a light beam in a direction orthogonal to the motion of the gantry (120) by changing the angle of deflection of the first deflector linearly with time. To compensate for the gantry motion, the optical system includes a second deflector that deflects the light at a deflection angle determined as a function of the velocity of the gantry. The deflected light is focused on the object or pattern. Accordingly, the object or pattern is scanned along a corrected scan line orthogonal to first direction. The optical scanning system may also perform 'selected' scanning and 'look ahead/look behind' scanning.

公开(公告)号：EP0979386A1

公开(公告)日：2000-02-16

申请号：EP97931329.3

申请日：1997-06-19

Applicant: Robotic Vision Systems Inc.

Inventor： LIU, Kuo-Ching ,  LIANG, Chu-Kwo ,  FWU, Jong-Kae ,  HUANG, Chung-Po

IPC: G01B11/03 ,  G01B11/08 ,  G06T5/40

CPC classification number: G01B11/002

Abstract: A system is provided that simultaneously gathers three-dimensional and two-dimensional data for use in inspecting objects such as chip carriers for defects. Specifically, a source laser beam (303) is directed to an object and forms a spot (305) at the point of impingement at a known X-Y position on the object. The laser beam is reflected at the spot and light reflected off-axially (306, 307) with respect to the source laser beam (303) is detected by two position sensing detectors (PSDs) (310, 311). Simultaneous to detecting off-axially reflected light, retro-reflected light (i.e., the light reflected approximately co-axial with the source laser) is detected by a photo diode array (313). Three dimensional object information is determined from the position sensing detector (310, 311) signals and two-dimensional object information is determined from the photo diode array (313) signal.

Abstract translation: 提供了一种系统，其同时收集三维和二维数据以用于检查诸如芯片载体的物体的缺陷。 具体而言，源激光束（303）被引导至物体并且在物体上的已知X-Y位置处的撞击点处形成点（305）。 激光束在该点反射，并且由两个位置感测检测器（PSD）（310,311）检测相对于源激光束（303）轴向（306,307）反射的光。 在检测离轴反射光的同时，由光电二极管阵列（313）检测回射光（即与源激光器近似同轴反射的光）。 根据位置感测检测器（310,311）信号确定三维物体信息，并且从光电二极管阵列（313）信号确定二维物体信息。