PLASMA JET CHEMICAL VAPOR DEPOSITION SYSTEM, AND METHOD FOR COATING NONPLANAR SURFACE WITH DIAMOND

    公开(公告)号:JP2001181843A

    公开(公告)日:2001-07-03

    申请号:JP2000339446

    申请日:2000-11-07

    Abstract: PROBLEM TO BE SOLVED: To form a diamond coating of minimum temperature gradient on the nonplanar surface to uniform thickness. SOLUTION: The system for forming a chemical vapor deposition(CVD) diamond coating film on the nonplanar surface of an object has a deflection plate having a deflection surface which resists diamond coating by a diamond forming reagent formed by the system and can withstand relatively high vapor deposition temperature. The deflection plate is disposed in a substantially axial direction together with the axis of the distribution head of a CVD engine. The deflection plate has a nearly wedged or conical shape and is connected to a motor which rotates the deflection plate at relatively high speed. A mandrel is disposed around the deflection plate or on one side thereof. A jet from the distribution head is deflected by the deflection plate on the surface of the object located in the position above the mandrel. The surface of the object is not planar.

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    发明专利
    未知

    公开(公告)号:FR2802129A1

    公开(公告)日:2001-06-15

    申请号:FR0016103

    申请日:2000-12-08

    Abstract: A system and method for depositing a CVD diamond coating on a non-planar surface of an object is provided. The system includes a deflector having a deflecting surface which resists diamond coating by the diamond forming reagents produced by the system and which is adapted to withstand the relatively high deposition temperatures is provided. The deflector is positioned substantially axially with an axis of the distribution head of the CVD engine. The deflector is preferably generally wedge-shaped or conical and coupled to a motor which is adapted to rotate the deflector at a relatively high speed. A mandrel may be positioned about or to one side of the deflector. The deflector is oriented with respect to the distribution head and the mandrel such that a jet exiting the distribution head is deflected by the deflector onto a surface of an object positioned on the mandrel. The object surface may be non-planar.

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