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公开(公告)号：JP2001026498A
公开(公告)日：2001-01-30
申请号：JP2000166519
申请日：2000-05-31
Applicant: SAINT GOBAIN CERAMICS
Inventor： WINDISCHMANN HENRY , YUSCINSKY JOHN L
Abstract: PROBLEM TO BE SOLVED: To provide a simple and good method for producing a doped diamond, in which an additive is added into a diamond film during production of the diamond. SOLUTION: The method for producing a doped diamond is comprised of the step of arranging a substrate 40 at the lower side of a nozzle 16 of a plasma jet reactor, the step of providing a non-powder solid additive between the substrate 40 and the plasma jet reactor, which solid additive is selected so as to make a diamond highly conductive, the step of realizing arc jet, the step of supplying at least one reactive chemical compound necessary to deposit the diamond 42 on the substrate 40 to the arc jet and the step of successively supplying the chemical compound until the diamond having a desired thickness is deposited on the substrate 40.
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2.发明专利
公开(公告)号：JP2001181843A
公开(公告)日：2001-07-03
申请号：JP2000339446
申请日：2000-11-07
Applicant: SAINT GOBAIN CERAMICS
Inventor： WINDISCHMANN HENRY , B SHEPARD JR CECIL , O PATTEN JR DONALD
IPC: B05D3/10 , C23C16/27 , C23C16/44 , C23C16/455 , C23C16/513 , C30B29/04
Abstract: PROBLEM TO BE SOLVED: To form a diamond coating of minimum temperature gradient on the nonplanar surface to uniform thickness. SOLUTION: The system for forming a chemical vapor deposition(CVD) diamond coating film on the nonplanar surface of an object has a deflection plate having a deflection surface which resists diamond coating by a diamond forming reagent formed by the system and can withstand relatively high vapor deposition temperature. The deflection plate is disposed in a substantially axial direction together with the axis of the distribution head of a CVD engine. The deflection plate has a nearly wedged or conical shape and is connected to a motor which rotates the deflection plate at relatively high speed. A mandrel is disposed around the deflection plate or on one side thereof. A jet from the distribution head is deflected by the deflection plate on the surface of the object located in the position above the mandrel. The surface of the object is not planar.
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公开(公告)号：JP2001247965A
公开(公告)日：2001-09-14
申请号：JP2001000164
申请日：2001-01-04
Applicant: SAINT GOBAIN CERAMICS
Inventor： WINDISCHMANN HENRY
Abstract: PROBLEM TO BE SOLVED: To provide a thin diamond film having corrosion resistance similar to that of the conventional thick diamond film. SOLUTION: This thin diamond film is relatively slowly deposited at a relatively low methane concentration and is confirmed by Raman spectrographic characteristics. The thin diamond film having a thickness, preferably, of 5 to 40 micron brings corrosion and erosion resistance substantially higher in the corrosive environment than those of the other thin films. It is considered that, in the thin diamond film, increased chemical resistance can be obtained by its purity and quality.
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公开(公告)号：DE69629980D1
公开(公告)日：2003-10-23
申请号：DE69629980
申请日：1996-05-29
Applicant: SAINT GOBAIN CERAMICS
Inventor： PATTEN JR , SIMPSON MATTHEW A , WINDISCHMANN HENRY , HEUSER MICHAEL S , QUIRK WILLIAM A , JAFFE STEPHEN M
Abstract: A method and corresponding apparatus for depositing a substance with temperature control on a surface of a substrate are disclosed. The method comprises the steps of : providing a cooling block having a surface that is cooled by heat exchange ; supporting said substrate from said cooling block so that the bottom surface of said substrate is spaced from said cooling block surface by a gap ; providing a gas in said gap ; and depositing said substance on the top surface of said substrate. With such a method, the temperature conditions are uniform and repeatable when depositing a substance on a substrate. The invention is especially applicable to deposition of diamond by plasma jet.
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公开(公告)号：GB2357090B
公开(公告)日：2002-04-24
申请号：GB0030164
申请日：2000-12-11
Applicant: SAINT GOBAIN CERAMICS
Inventor： WINDISCHMANN HENRY , SHEPARD CECIL B , PATTEN DONALD O
IPC: B05D3/10 , C23C16/27 , C23C16/44 , C23C16/455 , C23C16/513 , C30B29/04
Abstract: A system and method for depositing a CVD diamond coating on a non-planar surface of an object is provided. The system includes a deflector having a deflecting surface which resists diamond coating by the diamond forming reagents produced by the system and which is adapted to withstand the relatively high deposition temperatures is provided. The deflector is positioned substantially axially with an axis of the distribution head of the CVD engine. The deflector is preferably generally wedge-shaped or conical and coupled to a motor which is adapted to rotate the deflector at a relatively high speed. A mandrel may be positioned about or to one side of the deflector. The deflector is oriented with respect to the distribution head and the mandrel such that a jet exiting the distribution head is deflected by the deflector onto a surface of an object positioned on the mandrel. The object surface may be non-planar.
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Patent Agency Ranking
公开(公告)号：FR2802129A1
公开(公告)日：2001-06-15
申请号：FR0016103
申请日：2000-12-08
Applicant: SAINT GOBAIN CERAMICS
Inventor： WINDISCHMANN HENRY , B SHEPARD JR CECIL , O PATTEN JR DONALD
IPC: B05D3/10 , C23C16/27 , C23C16/44 , C23C16/455 , C23C16/513 , C30B29/04 , B05D7/24 , B05C9/10
Abstract: A system and method for depositing a CVD diamond coating on a non-planar surface of an object is provided. The system includes a deflector having a deflecting surface which resists diamond coating by the diamond forming reagents produced by the system and which is adapted to withstand the relatively high deposition temperatures is provided. The deflector is positioned substantially axially with an axis of the distribution head of the CVD engine. The deflector is preferably generally wedge-shaped or conical and coupled to a motor which is adapted to rotate the deflector at a relatively high speed. A mandrel may be positioned about or to one side of the deflector. The deflector is oriented with respect to the distribution head and the mandrel such that a jet exiting the distribution head is deflected by the deflector onto a surface of an object positioned on the mandrel. The object surface may be non-planar.
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公开(公告)号：GB2358409A
公开(公告)日：2001-07-25
申请号：GB0100283
申请日：2001-01-05
Applicant: SAINT GOBAIN CERAMICS
Inventor： WINDISCHMANN HENRY
Abstract: A thin film diamond coating is grown by a plasma enhanced chemical vapour deposition method. The plasma composition includes hydrogen and less than 0.7 % methane and is deposited on a substrate kept at less than 900{ C. The resulting film is characterised by its Raman spectrum with a peak width at half height of less than 10 cm -1 and by its thermal conductivity which is greater than 1000 W/mK. The film may be rendered semiconducting by boron doping. Uses for the film include: increasing the service life of articles exposed to corrosive environments, protecting electrodes used in the detoxification of corrosive fluids and protecting the interior components of a plasma CVD reactor.
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公开(公告)号：DE10100424A1
公开(公告)日：2001-07-12
申请号：DE10100424
申请日：2001-01-08
Applicant: SAINT GOBAIN CERAMICS
Inventor： WINDISCHMANN HENRY
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公开(公告)号：DE10060886A1
公开(公告)日：2001-07-05
申请号：DE10060886
申请日：2000-12-07
Applicant: SAINT GOBAIN CERAMICS
Inventor： WINDISCHMANN HENRY , SHEPARD CECIL B JUN , PATTEN DONALD O JUN
IPC: B05D3/10 , C23C16/27 , C23C16/44 , C23C16/455 , C23C16/513 , C30B29/04
Abstract: A system and method for depositing a CVD diamond coating on a non-planar surface of an object is provided. The system includes a deflector having a deflecting surface which resists diamond coating by the diamond forming reagents produced by the system and which is adapted to withstand the relatively high deposition temperatures is provided. The deflector is positioned substantially axially with an axis of the distribution head of the CVD engine. The deflector is preferably generally wedge-shaped or conical and coupled to a motor which is adapted to rotate the deflector at a relatively high speed. A mandrel may be positioned about or to one side of the deflector. The deflector is oriented with respect to the distribution head and the mandrel such that a jet exiting the distribution head is deflected by the deflector onto a surface of an object positioned on the mandrel. The object surface may be non-planar.
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