公开(公告)号：DE10060886A1

公开(公告)日：2001-07-05

申请号：DE10060886

申请日：2000-12-07

Applicant: SAINT GOBAIN CERAMICS

Inventor： WINDISCHMANN HENRY ,  SHEPARD CECIL B JUN ,  PATTEN DONALD O JUN

IPC: B05D3/10 ,  C23C16/27 ,  C23C16/44 ,  C23C16/455 ,  C23C16/513 ,  C30B29/04

Abstract: A system and method for depositing a CVD diamond coating on a non-planar surface of an object is provided. The system includes a deflector having a deflecting surface which resists diamond coating by the diamond forming reagents produced by the system and which is adapted to withstand the relatively high deposition temperatures is provided. The deflector is positioned substantially axially with an axis of the distribution head of the CVD engine. The deflector is preferably generally wedge-shaped or conical and coupled to a motor which is adapted to rotate the deflector at a relatively high speed. A mandrel may be positioned about or to one side of the deflector. The deflector is oriented with respect to the distribution head and the mandrel such that a jet exiting the distribution head is deflected by the deflector onto a surface of an object positioned on the mandrel. The object surface may be non-planar.

公开(公告)号：DE10060886C2

公开(公告)日：2003-01-30

申请号：DE10060886

申请日：2000-12-07

Applicant: SAINT GOBAIN CERAMICS

Inventor： WINDISCHMANN HENRY ,  SHEPARD CECIL B JUN ,  PATTEN DONALD O JUN

IPC: B05D3/10 ,  C23C16/27 ,  C23C16/44 ,  C23C16/455 ,  C23C16/513 ,  C30B29/04

Abstract: A system and method for depositing a CVD diamond coating on a non-planar surface of an object is provided. The system includes a deflector having a deflecting surface which resists diamond coating by the diamond forming reagents produced by the system and which is adapted to withstand the relatively high deposition temperatures is provided. The deflector is positioned substantially axially with an axis of the distribution head of the CVD engine. The deflector is preferably generally wedge-shaped or conical and coupled to a motor which is adapted to rotate the deflector at a relatively high speed. A mandrel may be positioned about or to one side of the deflector. The deflector is oriented with respect to the distribution head and the mandrel such that a jet exiting the distribution head is deflected by the deflector onto a surface of an object positioned on the mandrel. The object surface may be non-planar.