公开(公告)号：BR0014533A

公开(公告)日：2002-06-04

申请号：BR0014533

申请日：2000-08-30

Applicant: SAINT GOBAIN CERAMICS E PLASTI

Inventor： GARG AJAY K ,  TANIKELLA BRAHMANANDAM ,  DELANEY WILLIAM R

IPC: B24B37/00 ,  C01F7/44 ,  C09G1/02 ,  C09K3/14 ,  H01L21/304 ,  H01L21/321

Abstract: CMP processes and products employ aluminas comprising alpha alumina particles having a particle width of less than 50 nanometers and a surface area of at least 50 m2/gm.

公开(公告)号：AT545481T

公开(公告)日：2012-03-15

申请号：AT07855323

申请日：2007-12-21

Applicant: SAINT GOBAIN CERAMICS

Inventor： TANIKELLA BRAHMANANDAM ,  CHINNAKARUPPAN PALANIAPPAN ,  RIZZUTO ROBERT A ,  CHERIAN ISAAC ,  VEDANTHAM RAMANUJAM

IPC: B24B1/00 ,  B24B7/22

Abstract: A sapphire substrate includes a generally planar surface having a crystallographic orientation selected from the group consisting of a-plane, r-plane, m-plane, and c-plane orientations, and having a nTTV of not greater than about 0.037 μm/cm2, wherein nTTV is total thickness variation normalized for surface area of the generally planar surface, the substrate having a diameter not less than about 9.0 cm.