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公开(公告)号：AU7090200A
公开(公告)日：2001-05-10
申请号：AU7090200
申请日：2000-08-30
Applicant: SAINT GOBAIN CERAMICS AND PLASTICS INC
Inventor： GARG AJAY K , TANIKELLA BRAHMANANDAM V , DELANEY WILLIAM R
IPC: B24B37/00 , C01F7/44 , C09G1/02 , C09K3/14 , H01L21/304 , H01L21/321
Abstract: CMP processes and products employ aluminas comprising alpha alumina particles having a particle width of less than 50 nanometers and a surface area of at least 50 m2/gm.
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