公开(公告)号：US09488519B2

公开(公告)日：2016-11-08

申请号：US14730762

申请日：2015-06-04

Applicant: SAMCO INC.

Inventor： Kiyoshi Hasegawa ,  Hiroshi Kawamura ,  Peter Wood

IPC: G01N21/55 ,  G01J1/02 ,  G01J1/42 ,  G01N21/84

CPC classification number: G01J1/0238 ,  G01J1/4257 ,  G01N21/55 ,  G01N2021/8427 ,  G01N2201/025 ,  G01N2201/1087

Abstract: The present invention provides a light beam measuring instrument that can securely receive light reflected by a sample. The light beam measuring instrument 1 includes an optical axis tilting mechanism 13 that includes a first tilting mechanism 131 and a second tilting mechanism 132. From the optical axis A1 of irradiation light beam emitted from a light beam source 112, the first tilting mechanism 131 tilts the optical axis A1 about the first tilting axis T1. The second tilting mechanism 132 tilts the optical axis A1 about the second tilting axis T2. The light beam measuring instrument 1 can receive the light reflected by the semiconductor chip C by means of operation of the optical axis tilting mechanism 13 even if the light reflected by the semiconductor chip C is tilted. Accordingly, this apparatus can securely perform measurement or inspection using the light beam.

Abstract translation: 本发明提供了一种可以安全地接收由样品反射的光的光束测量仪器。 光束测量仪1包括光轴倾斜机构13，其包括第一倾斜机构131和第二倾斜机构132.从光束源112发射的照射光束的光轴A1，第一倾斜机构131倾斜 围绕第一倾斜轴线T1的光轴A1。 第二倾斜机构132围绕第二倾斜轴T2倾斜光轴A1。 即使由半导体芯片C反射的光倾斜，光束测量仪器1也可以通过光轴倾斜机构13的操作来接收由半导体芯片C反射的光。 因此，该装置可以可靠地执行使用光束的测量或检查。