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公开(公告)号:US20250054916A1
公开(公告)日:2025-02-13
申请号:US18931874
申请日:2024-10-30
Applicant: Samsung Electronics Co., Ltd.
Inventor: Jimin CHOI , Jeonil LEE , Jongmin LEE , Juik LEE
IPC: H01L25/065 , H01L23/367 , H01L23/42 , H01L23/48
Abstract: A thermal pad of a semiconductor chip, a semiconductor chip including the thermal pad, and a method of manufacturing the semiconductor chip, the thermal pad including a thermal core in a trench at a lower surface of a semiconductor substrate, the thermal core being configured to receive heat generated from a through silicon via (TSV) vertically extending through the semiconductor substrate; a thermal head connected to the thermal core and protruding from the lower surface of the semiconductor substrate, the thermal head being configured to dissipate the heat in the thermal core; a first insulation layer between an inner surface of the trench and the thermal core; and a second insulation layer between the first insulation layer and the thermal core.
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公开(公告)号:US20230178634A1
公开(公告)日:2023-06-08
申请号:US18072784
申请日:2022-12-01
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Jeonil LEE , Gyuhyun KIL , Doosan BACK , Chansic YOON , Junghoon HAN
IPC: H01L29/66 , H10B12/00 , H01L29/78 , H01L29/423
CPC classification number: H01L29/6656 , H01L27/10897 , H01L27/10894 , H01L29/7833 , H01L29/6659 , H01L29/42364 , H01L27/10814 , H01L27/10885 , H01L27/10823
Abstract: A semiconductor device includes a substrate, a gate dielectric layer on the substrate, the gate dielectric layer including a recess at a side surface thereof, a gate electrode structure on the gate dielectric layer, a gate capping layer on the gate electrode structure, and a spacer structure on the substrate and covering side surfaces of the gate dielectric layer, the gate electrode structure, and the gate capping layer, the spacer structure including a first spacer, a second spacer on the first spacer and covering the recess, and a third spacer on the second spacer, the second spacer and the third spacer including silicon nitride.
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公开(公告)号:US20250120072A1
公开(公告)日:2025-04-10
申请号:US18829537
申请日:2024-09-10
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Seryeun YANG , Jinwoo HAN , Jeonil LEE
IPC: H10B12/00 , H01L25/065 , H10B80/00
Abstract: A memory device includes a peripheral circuit layer including a peripheral circuit region. A cell layer is arranged at a different vertical level from the peripheral circuit layer and includes a cell region. A core layer is arranged between the peripheral circuit layer and the cell layer and is electrically connected to the peripheral circuit region and the cell region. The cell region includes a plurality of cell banks each including a memory component. The core circuit region includes a plurality of core banks arranged at positions at least partially vertically overlapping the plurality of cell banks, respectively. Each of the plurality of core banks includes a core circuit.
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公开(公告)号:US20250089236A1
公开(公告)日:2025-03-13
申请号:US18954927
申请日:2024-11-21
Applicant: Samsung Electronics Co., Ltd.
Inventor: Jeonil LEE , Youngjun KIM , Jinbum KIM
IPC: H10B12/00
Abstract: A semiconductor device including an active pattern; a gate structure connected to the active pattern; a bit line structure connected to the active pattern; a buried contact connected to the active pattern; a contact pattern covering the buried contact; a landing pad connected to the contact pattern; and a capacitor structure connected to the landing pad, wherein the buried contact includes a first growth portion and a second growth portion spaced apart from each other, and the landing pad includes an interposition portion between the first growth portion and the second growth portion.
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公开(公告)号:US20230078980A1
公开(公告)日:2023-03-16
申请号:US17696989
申请日:2022-03-17
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Jimin CHOI , Jeonil LEE , Jongmin LEE , Juik LEE
IPC: H01L25/065 , H01L23/367 , H01L23/42 , H01L23/48
Abstract: A thermal pad of a semiconductor chip, a semiconductor chip including the thermal pad, and a method of manufacturing the semiconductor chip, the thermal pad including a thermal core in a trench at a lower surface of a semiconductor substrate, the thermal core being configured to receive heat generated from a through silicon via (TSV) vertically extending through the semiconductor substrate; a thermal head connected to the thermal core and protruding from the lower surface of the semiconductor substrate, the thermal head being configured to dissipate the heat in the thermal core; a first insulation layer between an inner surface of the trench and the thermal core; and a second insulation layer between the first insulation layer and the thermal core.
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公开(公告)号:US20250053322A1
公开(公告)日:2025-02-13
申请号:US18650412
申请日:2024-04-30
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Jeonil LEE , Jinwoo HAN , Seryeun YANG
IPC: G06F3/06
Abstract: There is provided a memory device including a processing-in-memory (PIM) dynamic random access memory (DRAM) die(s) and PIM-high bandwidth memory (HBM) devices. The memory device includes a core peripheral circuit structure including a bank core circuit including a row decoder and a sense amplifier of each of a plurality of banks, and a cell array structure disposed on the core peripheral circuit structure. The bank core circuit includes a plurality of sub core circuits correspondingly connected to the plurality of sub cell blocks, respectively. Each of the plurality of sub core circuits includes a sense amplifier segmented to be connected to a corresponding sub cell block, and a processing element connected to the segmented sense amplifier and configured to perform a logical operation on an operand that is data loaded into the segmented sense amplifier.
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公开(公告)号:US20230051597A1
公开(公告)日:2023-02-16
申请号:US17579919
申请日:2022-01-20
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Jeonil LEE , Youngjun KIM , Jinbum KIM
IPC: H01L27/108
Abstract: A semiconductor device including an active pattern; a gate structure connected to the active pattern; a bit line structure connected to the active pattern; a buried contact connected to the active pattern; a contact pattern covering the buried contact; a landing pad connected to the contact pattern; and a capacitor structure connected to the landing pad, wherein the buried contact includes a first growth portion and a second growth portion spaced apart from each other, and the landing pad includes an interposition portion between the first growth portion and the second growth portion.
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公开(公告)号:US20200286732A1
公开(公告)日:2020-09-10
申请号:US16807702
申请日:2020-03-03
Applicant: Samsung Electronics Co., Ltd.
Inventor: Keunwook SHIN , Janghee LEE , Seunggeol NAM , Hyeonjin SHIN , Hyunseok LIM , Alum JUNG , Kyung-Eun BYUN , Jeonil LEE , Yeonchoo CHO
Abstract: Provided are a method of pre-treating a substrate and a method of directly forming graphene by using the method of pre-treating the substrate. In the method of pre-treating the substrate in the method of directly forming graphene, according to an embodiment, the substrate is pre-treated by using a pre-treatment gas including at least a carbon source and hydrogen. The method of directly forming graphene includes a process of pre-treating a substrate and a process of directly growing graphene on the substrate that is pre-treated. The process of pre-treating the substrate is performed according to the method of pre-treating the substrate.
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公开(公告)号:US20240322048A1
公开(公告)日:2024-09-26
申请号:US18606081
申请日:2024-03-15
Applicant: Samsung Electronics Co., Ltd.
Inventor: Kyunghwan LEE , Jeonil LEE , Minhee CHO , Daweon HA
IPC: H01L29/792 , H10B12/00
CPC classification number: H01L29/7926 , H10B12/482 , H10B12/485 , H10B12/488
Abstract: Provided is an integrated circuit device including a source line extending in a first horizontal direction on a substrate, a channel layer extending in a vertical direction, disposed on the source line, and having a first sidewall and a second sidewall, a trapping layer on the first sidewall of the channel layer and including an oxide semiconductor, a word line on at least one sidewall of the trapping layer and extending in a second horizontal direction crossing the first horizontal direction, a gate insulation layer between the at least one sidewall of the trapping layer and the word line, and a bit line electrically connected to the channel layer and extending in the first horizontal direction, wherein the channel layer has a first bandgap energy, and the trapping layer has a second bandgap energy that is greater than the first bandgap energy.
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公开(公告)号:US20230389290A1
公开(公告)日:2023-11-30
申请号:US18200135
申请日:2023-05-22
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Jeonil LEE , Kyunghwan LEE , Min Hee CHO
CPC classification number: H10B12/315 , H10B12/482 , H10B12/485 , H10B53/10 , H10B53/30 , H01L29/0847
Abstract: A semiconductor device includes a first single crystal semiconductor pattern including a first source/drain region, a second source/drain region, and a first vertical channel region between the first source/drain region and the second source/drain region, the second source/drain region being at a higher level than the first source/drain region; a first gate electrode facing a first side surface of the first single crystal semiconductor pattern; a first gate dielectric layer, the first gate dielectric layer including a portion between the first single crystal semiconductor pattern and the first gate electrode; and a complementary structure in contact with a second side surface of the first single crystal semiconductor pattern, wherein the complementary structure includes an oxide semiconductor layer.
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