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1.发明申请METHOD FOR REDUCING VARIATIONS IN ARRAYS OF MICRO-MACHINED CANTILEVER STRUCTURES USING ION IMPLANTATION 审中-公开用离子注入减少微机械悬臂结构阵列变化的方法
公开(公告)号：WO0136319A8
公开(公告)日：2001-09-27
申请号：PCT/US0031358
申请日：2000-11-15
Applicant: SARNOFF CORP
Inventor： VILLANI THOMAS STEPHEN , GOODMAN LAWRENCE A
CPC classification number: B81C1/00666 , B81C2201/0164
Abstract: A method of adjusting the position of a micro-mechanical bi-material cantilever is provided. The bi-material includes a first and a second material and each material has a corresponding thermal expansion coefficient. The method includes implanting ions predominantly into one material of the bi-material to modify internal stress in one of the first and second materials relative to the other material. The deformation of the bi-material is then detected to modulate the implantation of ions thereto.
Abstract translation: 提供了调整微机械双材料悬臂的位置的方法。 双材料包括第一和第二材料，并且每种材料具有相应的热膨胀系数。 该方法包括主要将离子注入到双材料的一种材料中以相对于另一种材料改变第一和第二材料之一中的内部应力。 然后检测双材料的变形以调节离子注入到其上。
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