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    DOUBLE MODE DETECTION OF CHARGED PARTICLE
    1.
    发明专利
    DOUBLE MODE DETECTION OF CHARGED PARTICLE 失效

    公开(公告)号：JP2000164167A

    公开(公告)日：2000-06-16

    申请号：JP32330999

    申请日：1999-11-12

    Applicant: SCHLUMBERGER TECHNOLOGIES INC

    Inventor： DUVAL PAUL J ,  INTO STEPHEN W ,  ROSENBERG IRA ,  CASA NEIL S ,  BRAUN KENETH H ,  VAYNER VLADIMIR

    IPC: G01N23/225 ,  G01T1/29 ,  H01J37/244 ,  H01J49/44

    Abstract: PROBLEM TO BE SOLVED: To separately and simultaneously read a high energy charged particle and a low energy charged particle by arranging a high energy detector so as to deflect the low energy charged particle toward a low energy detector, and arranging the low energy detector so as to detect a deflected low energy charged particle. SOLUTION: The front 20a of a backward scattering(BSE) detector 20 turns downward to a sample 5, and the front 22a of a secondary electron(SE) detector 22 turns upward to an electron supply source 22. A deflector 24 is positioned above the SE detector 22. When a backward scattered electron is emitted from the sample 5, an electron dislocated from the axis in an allowable angle range is recovered by the BSE detector 20. A secondary electron being on the axis or almost on the axis is repulsed by the deflector 24 to be thereby pointed to the SE detector 22.

    FIXING TOOL FOR ASSEMBLING EACH MEMBER COMPOSING A DEVICE SUCH AS WIEN FILTER
    2.
    发明专利
    FIXING TOOL FOR ASSEMBLING EACH MEMBER COMPOSING A DEVICE SUCH AS WIEN FILTER 审中-公开

    公开(公告)号：JP2003178706A

    公开(公告)日：2003-06-27

    申请号：JP2002316686

    申请日：2002-10-30

    Applicant: SCHLUMBERGER TECHNOLOGIES INC

    Inventor： DUVAL PAUL J ,  VAYNER VLADIMIR

    IPC: B23P19/00 ,  H01J9/18 ,  H01J37/05

    Abstract: PROBLEM TO BE SOLVED: To provide a fixing tool that can secure relative positioning of the members precisely and reliably in the assembly of a plurality of magnetic poles to a support structure. SOLUTION: This is a fixing tool for assembling a plurality of members to a support structure and comprises a body (10, 12) for defining a space that is structured to accommodate the support structure and a plurality of members, an arm that is fitted on the outside structure (12) so as to be capable of moving in the pushing direction of the member and engages with the corresponding outside end portion of the plurality of members in such movement, a means driven by gravity (weight C) that engages the arm with the plural members by energizing in the pushing direction of the member and thereby pushes the plural members onto the engaging position for the support structure. COPYRIGHT: (C)2003,JPO

    WIEN FILTER USED IN SCANNING ELECTRON MICROSCOPE OR THE LIKE
    3.
    发明专利
    WIEN FILTER USED IN SCANNING ELECTRON MICROSCOPE OR THE LIKE 审中-公开

    公开(公告)号：JP2003151477A

    公开(公告)日：2003-05-23

    申请号：JP2002316685

    申请日：2002-10-30

    Applicant: SCHLUMBERGER TECHNOLOGIES INC

    Inventor： DUVAL PAUL J ,  RUBIN ALLAN I ,  ROSENBERG IRA ,  VAYNER VLADIMIR ,  SULLIVAN NEAL T

    IPC: H01J37/256 ,  H01J37/05 ,  H01J37/244 ,  H01J37/28

    Abstract: PROBLEM TO BE SOLVED: To provide an electromagnetic filter capable of improving resolution of a device. SOLUTION: This electromagnetic filter is provided with a magnetic pole D at least partially surrounding a passage C. The filter is provided with a support structure E provided with plural through-holes 4, a magnetic pole D passing through the through-holes and continuously extending, with one end part terminated at a magnetic pole surface 10 and having a small dimension part 14 provided on the other end part, and an electromagnetic coil 16 composed to generate an emission electromagnetic field. The filter functions with a combination with a magnetic circuit means B arranged outside of the support structure E, in this case there is a gap 29 between the magnetic pole D and the magnetic circuit means B. The gap 29 is arranged in outside of the support structure E in a radial direction.

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