公开(公告)号：WO2014113680A3

公开(公告)日：2015-03-26

申请号：PCT/US2014012060

申请日：2014-01-17

Applicant: SCIAPS INC

Inventor： DAY DAVID

IPC: G01J3/02

CPC classification number: G01J3/443 ,  G01J3/0208 ,  G01J3/0237 ,  G01J3/0272 ,  G01J3/06 ,  G01J3/44 ,  H01L22/26

Abstract: An analysis system (e.g., LIBS) includes a laser source generating a laser beam, a movable optic configured to move said laser beam to multiple locations on a sample, and a spectrometer responsive to photons emitted by the sample at those locations and having an output. A controller is responsive to a trigger signal and is configured in a moving spot cycle to adjust the moveable optic, activate the laser source sequentially generating photons at multiple locations on the sample, and process the spectrometer output at each location.

Abstract translation: 分析系统（例如，LIBS）包括产生激光束的激光源，配置成将所述激光束移动到样品上的多个位置的可移动光学器件，以及响应于在那些位置的样品发射的光子的光谱仪，并具有输出 。 控制器响应于触发信号并且被配置成移动点周期以调整可移动光学元件，激活激光源在样本上的多个位置顺序地生成光子，并且处理每个位置处的光谱仪输出。