公开(公告)号：EP4443139A1

公开(公告)日：2024-10-09

申请号：EP24168205.3

申请日：2024-04-03

Applicant: SDT Inc.

Inventor： YUNE, Jiwon ,  YOO, Jeaha ,  YANG, Junseok

IPC: G01N21/71 ,  G01J3/02 ,  G01J3/443 ,  G01N15/00

CPC classification number: G01N21/718 ,  G01J3/443 ,  G01J3/0291

Abstract: Disclosed is a LIBS module including: a cover having a first optical channel 401 through which a laser beam passes and a second optical channel through which plasma emission light passes therein; a first optical system placed in the first optical channel; and a second optical system placed in the second optical channel. A clamp with a coupling hole through which a predetermined pipe may pass is formed in the cover, and the coupling hole is placed in a region where an extension path of the first optical channel and an extension path of the second optical channel cross. The clamp includes a first clamp branch and a second clamp branch, and while a first segment of the pipe is coupled to the coupling hole, the first clamp branch and the second clamp branch are tightened to each other to couple the pipe and the LIBS module to each other.