Abstract:
A method of forming an oxide-ceramics film capable of controlling the amount of oxygen in the film and with little oxygen deficiency. At least one or more of the steps among a step of forming an amorphous film, a step of heating the amorphous film for crystallization, and a step of these heat processings to be conducted thereafter include a step of processing under an atmosphere including moisture.
Abstract:
A method of forming an oxide-ceramics film capable of controlling the amount of oxygen in the film and with little oxygen deficiency. At least one or more of the steps among a step of forming an amorphous film, a step of heating the amorphous film for crystallization, and a step of these heat processings to be conducted thereafter include a step of processing under an atmosphere including moisture.
Abstract:
A thin film piezoelectric transducer comprises a first electrode layer (24), piezoelectric film layer (25), second electrode layer (26), and third electrode layer (27) formed on a supporting base (22) wherein a cavity (21) is formed. The second electrode layer (26) and the third electrode layer (27) are formed in a pair with a space therebetween on the piezoelectric film layer (25) located above said cavity (21).
Abstract:
A ferroelectric memory device comprises a memory cell array (100) including memory cells arranged in a matrix, first signal electrodes (12), second signal electrodes (16) arranged perpendicularly to the first electrodes (12), and a ferroelectric layer (14) disposed at least in an intersection of the first and second signal electrodes (12, 16) and a peripheral circuit (200) for selectively writing/reading information in/from the memory cell. The layer where the memory cell array (100) is provided is different from that where the peripheral circuit (200) is provided. The peripheral circuit (200) is provided in a region outside the memory cell array (100).
Abstract:
A memory cell array where a ferroelectric layer constituting a ferroelectric capacitor has a specific pattern and the stray capacitance of a signal electrode is small, a method for manufacturing the memory cell array, and a ferroelectric memory device. The memory cell array (100A) has memory cells each consisting of a ferroelectric capacitor (20) and arranged in a matrix. The ferroelectric capacitor (20) has a first signal electrode (12), a second signal electrode (16) arranged in a direction perpendicular to the first signal electrode (12), and a ferroelectric layer (14) linearly arranged along the first signal electrode (12) or the second signal electrode (16). The ferroelectric layer (14) can be arranged alternatively in a block only in the intersection of the first signal electrode (12) and the second signal electrode (16).