公开(公告)号：AT361897T

公开(公告)日：2007-06-15

申请号：AT99947884

申请日：1999-10-13

Applicant: SEIKO EPSON CORP

Inventor： KAMIJIMA SHUNJI ,  YONEKUBO MASATOSHI ,  TAKEDA TAKASHI ,  NISHIKAWA TAKAO

IPC: B81B1/00 ,  B81B3/00 ,  B81C1/00 ,  G02B26/02

Abstract: A micromachine and a manufacturing method according to the present invention are suitable for a micromachine that has a dynamic first microstructured portion serving as a drive portion, and a static second microstructured portion adapted to perform a switching function and functions to be performed as an optical element. The second microstructured portion can be manufactured at least without complex steps, such as a silicon process, by forming a static second microstructure on the dynamic first microstructured portion or in such a way as to be overlaid thereon by mold transfer. Thus, the microstructured portion of a complex shape can be easily formed with good reproducibility. This contributes to increased productivity thereof. Especially, when a plurality of elements are arranged in an array, similarly as in the case of a spatial light modulator, the stable reproduction thereof is achieved by the mold transfer. Thus, as compared with the case of manufacturing all elements in a silicon process, the probability of an occurrence of a defect is very low. Consequently, this contributes to improved yield of micromachines.

公开(公告)号：DE60302269T2

公开(公告)日：2006-07-13

申请号：DE60302269

申请日：2003-03-26

Applicant: SEIKO EPSON CORP

Inventor： YAMAZAKI TETSURO ,  KAMIJIMA SHUNJI ,  UCHIKAWA DAISUKE

IPC: G02B27/00 ,  G02B27/18 ,  F21V5/04 ,  F21V7/05 ,  F21V7/22 ,  F21V9/08 ,  F21V25/12 ,  F21Y101/00 ,  G02F1/01 ,  G02F1/13357 ,  G03B21/00 ,  G03B21/14 ,  H04N9/31

Abstract: An illumination device comprises:an integrator (20) that transmits light from an incident side (20a) thereof to an emitting side (20b) thereof; a light source (12) that supplies the light to the incident side (20a) of the integrator (20), the light source (12) including a reflector (14) and a lamp (13) located on a center axis (14c) of the reflector (14); and a center mirror (30) located on a line connecting the center of the incident side (20a) of the integrator (20, 21) and the lamp (13), the center mirror (30) being capable of reflecting light from the integrator (20, 21) back to the integrator (20, 21). The center mirror (30) has a diameter smaller than that of an opening (14a) of the reflector (14).

公开(公告)号：DE69936041T2

公开(公告)日：2007-09-13

申请号：DE69936041

申请日：1999-10-13

Applicant: SEIKO EPSON CORP

Inventor： KAMIJIMA SHUNJI ,  YONEKUBO MASATOSHI ,  TAKEDA TAKASHI ,  NISHIKAWA TAKAO

IPC: B81B1/00 ,  B81B3/00 ,  B81C1/00 ,  G02B26/02

Abstract: A micromachine and a manufacturing method according to the present invention are suitable for a micromachine that has a dynamic first microstructured portion serving as a drive portion, and a static second microstructured portion adapted to perform a switching function and functions to be performed as an optical element. The second microstructured portion can be manufactured at least without complex steps, such as a silicon process, by forming a static second microstructure on the dynamic first microstructured portion or in such a way as to be overlaid thereon by mold transfer. Thus, the microstructured portion of a complex shape can be easily formed with good reproducibility. This contributes to increased productivity thereof. Especially, when a plurality of elements are arranged in an array, similarly as in the case of a spatial light modulator, the stable reproduction thereof is achieved by the mold transfer. Thus, as compared with the case of manufacturing all elements in a silicon process, the probability of an occurrence of a defect is very low. Consequently, this contributes to improved yield of micromachines.

公开(公告)号：DE69936041D1

公开(公告)日：2007-06-21

申请号：DE69936041

申请日：1999-10-13

Applicant: SEIKO EPSON CORP

Inventor： KAMIJIMA SHUNJI ,  YONEKUBO MASATOSHI ,  TAKEDA TAKASHI ,  NISHIKAWA TAKAO

IPC: B81B1/00 ,  B81B3/00 ,  B81C1/00 ,  G02B26/02

Abstract: A micromachine and a manufacturing method according to the present invention are suitable for a micromachine that has a dynamic first microstructured portion serving as a drive portion, and a static second microstructured portion adapted to perform a switching function and functions to be performed as an optical element. The second microstructured portion can be manufactured at least without complex steps, such as a silicon process, by forming a static second microstructure on the dynamic first microstructured portion or in such a way as to be overlaid thereon by mold transfer. Thus, the microstructured portion of a complex shape can be easily formed with good reproducibility. This contributes to increased productivity thereof. Especially, when a plurality of elements are arranged in an array, similarly as in the case of a spatial light modulator, the stable reproduction thereof is achieved by the mold transfer. Thus, as compared with the case of manufacturing all elements in a silicon process, the probability of an occurrence of a defect is very low. Consequently, this contributes to improved yield of micromachines.

公开(公告)号：DE69830153T2

公开(公告)日：2005-10-13

申请号：DE69830153

申请日：1998-11-27

Applicant: SEIKO EPSON CORP

Inventor： TAKEDA TAKASHI ,  YONEKUBO MASATOSHI ,  ITO HIROKAZU ,  KAMIJIMA SHUNJI

IPC: G02B26/08 ,  G09G3/34 ,  G09F9/30 ,  G02B26/02 ,  G09F9/37

Abstract: An optical switching device comprises: a light guide including a total reflection plane capable of totally reflecting light thereby transmitting the light; a switching part capable of, at a position where its extraction plane is in close contact with the total reflection plane, capturing evanescent light and reflecting the captured light thereby outputting it; and a driving part for driving the optical switching part. The light guide, the switching part, and the driving part are laminated in this order into a multilayer structure. The employment of the multilayer structure makes it possible to optimize the respective layers independently of one another. The extracted light does not pass through the driving part. This allows the driving part to be optimized so as to achieve an optical switching device capable of operating at a high speed with low power consumption. Thus, it is possible to provide a low-loss and high-contrast optical switching device using an evanescent wave, which can respond at a high speed.

公开(公告)号：DE69830153D1

公开(公告)日：2005-06-16

申请号：DE69830153

申请日：1998-11-27

Applicant: SEIKO EPSON CORP

Inventor： TAKEDA TAKASHI ,  YONEKUBO MASATOSHI ,  ITO HIROKAZU ,  KAMIJIMA SHUNJI

IPC: G02B26/08 ,  G09G3/34 ,  G09F9/30 ,  G02B26/02 ,  G09F9/37

Abstract: An optical switching device comprises: a light guide including a total reflection plane capable of totally reflecting light thereby transmitting the light; a switching part capable of, at a position where its extraction plane is in close contact with the total reflection plane, capturing evanescent light and reflecting the captured light thereby outputting it; and a driving part for driving the optical switching part. The light guide, the switching part, and the driving part are laminated in this order into a multilayer structure. The employment of the multilayer structure makes it possible to optimize the respective layers independently of one another. The extracted light does not pass through the driving part. This allows the driving part to be optimized so as to achieve an optical switching device capable of operating at a high speed with low power consumption. Thus, it is possible to provide a low-loss and high-contrast optical switching device using an evanescent wave, which can respond at a high speed.

公开(公告)号：DE602004017521D1

公开(公告)日：2008-12-11

申请号：DE602004017521

申请日：2004-06-25

Applicant: SEIKO EPSON CORP

Inventor： KAMIJIMA SHUNJI

IPC: G02B5/04 ,  G02F1/13 ,  G02F1/1335 ,  G03B21/00 ,  H04N5/74 ,  H04N9/31 ,  H04N17/00

Abstract: A spatial light modulator (110R, 110G, 110B) includes a prism group (210) and satisfies either of the following conditions where d is a distance between a reference surface (901) and a flat surface (902b), » is a wavelength of an incident light, and n is a refractive index of the prism group.

公开(公告)号：DE60302269D1

公开(公告)日：2005-12-22

申请号：DE60302269

申请日：2003-03-26

Applicant: SEIKO EPSON CORP

Inventor： YAMAZAKI TETSURO ,  KAMIJIMA SHUNJI ,  UCHIKAWA DAISUKE

IPC: G02B27/18 ,  F21V5/04 ,  F21V7/05 ,  F21V7/22 ,  F21V9/08 ,  F21V25/12 ,  F21Y101/00 ,  G02B27/00 ,  G03B21/00 ,  G03B21/14 ,  H04N9/31 ,  G02F1/13357 ,  G02F1/01

Abstract: An illumination device comprises:an integrator (20) that transmits light from an incident side (20a) thereof to an emitting side (20b) thereof; a light source (12) that supplies the light to the incident side (20a) of the integrator (20), the light source (12) including a reflector (14) and a lamp (13) located on a center axis (14c) of the reflector (14); and a center mirror (30) located on a line connecting the center of the incident side (20a) of the integrator (20, 21) and the lamp (13), the center mirror (30) being capable of reflecting light from the integrator (20, 21) back to the integrator (20, 21). The center mirror (30) has a diameter smaller than that of an opening (14a) of the reflector (14).

公开(公告)号：EP1041036A4

公开(公告)日：2005-03-09

申请号：EP99947884

申请日：1999-10-13

Applicant: SEIKO EPSON CORP

Inventor： KAMIJIMA SHUNJI ,  YONEKUBO MASATOSHI ,  TAKEDA TAKASHI ,  NISHIKAWA TAKAO

IPC: B81B3/00 ,  B81C1/00 ,  G02B26/02 ,  B81B1/00

CPC classification number: B81C1/00182 ,  B81B2201/045 ,  B81C2201/034 ,  G02B26/02

Abstract: A micromachine and a method of manufacturing the same which are suitable as or for a micromachine having a first dynamic fine structural portion constituting a driving portion, and a second static fine structural portion performing a switching function or a function of an optical element, the method comprising forming the second static fine structural portion on the first dynamic fine structural portion, or superposing the second static fine structural portion thereon and die transferring the same thereto, whereby the method enables the second fine structure to be formed without using at least a complicated step, such as a silicon process in an intermediate stage of the method, and into a complicated shape easily with a high reproducibility, and contributes to the improvement of the productivity. Especially, when a plurality of elements are arranged in an arrayed state as in a spatial light modulator, the die transfer techniques enable the second fine structure to be reproduced stably as compared with the techniques using a silicon process for forming all parts of a micromachine, whereby the subject method reduces the probability of occurrence of defects to a remarkably low level and contributes to the improvement of the yield.

公开(公告)号：EP1533651A4

公开(公告)日：2007-03-07

申请号：EP04717300

申请日：2004-03-04

Applicant: SEIKO EPSON CORP

Inventor： KAMIJIMA SHUNJI ,  YONEKUBO MASATOSHI

IPC: G02F1/1335 ,  G02B5/04 ,  G02B6/00 ,  H04N9/31 ,  H04N17/00

CPC classification number: H04N9/3105 ,  G02B5/045 ,  G02F1/133504 ,  G02F1/133512 ,  H04N9/317 ,  H04N9/3185

Abstract: There are provided a spatial light modulation device and a projector capable of obtaining smooth image quality so that an observer does not recognize any light shading portion such as a black matrix. The projector includes a spatial light modulation device (110R) for modulating the incident light according to an image signal and emitting the modulated result and a prism group (210) arranged at the emission side of the spatial light modulation device (110R). The spatial light modulation device (110R) has an opening (230) as a plurality of pixel portions arranged in a matrix and a black matrix (220) arranged between them. The prism group (210) consists of a prism element (211) having at least a refraction surface (212). Light from one opening (230) is introduced into at least a part of the prism group (210). The direction of the refraction surface and the inclination angle ϑ are defined so as to introduce an opening image (230P) onto a black matrix portion image (220P) on a screen (116) at a predetermined distance L from the prism group (210).