INDUCTIVELY COUPLED PLASMA EMISSION SPECTROCHEMICAL ANALYZING APPARATUS

    公开(公告)号:JP2000214093A

    公开(公告)日:2000-08-04

    申请号:JP1620399

    申请日:1999-01-25

    Abstract: PROBLEM TO BE SOLVED: To maintain a positional relationship constant even when a force is applied to a torch by setting a torch branch pipe clip which enables a torch branch pipe to be fitted by rotating the torch centering a center axis of the torch. SOLUTION: The inductively coupled plasma emission spectrochemical analyzing apparatus is provided with a torch branch pipe clip 9 for holding, e.g. a plasma gas feed pipe 10 of a torch 12. A gap of the torch branch pipe clip 9 has an equal size to an outer diameter of the plasma gas feed pipe 10. The plasma gas feed branch pipe 10 is fitted by rotating the torch 12 about a center axis of the torch after setting the torch to a torch-fixing tool 7. The fixed torch 12 is accordingly prevented from moving back and forth in a direction of the center axis. A positional relationship in the direction of the center axis between an XYZ stage 14 and the torch 12 is kept constant. Unless a position of the XYZ stage 14 changes, a positional relationship between a plasma 2 formed to a leading end of the torch 12 and a sampling cone 1 or the like is constant at all times, and therefore measurement results of good reproducibility can be obtained.

    APPARATUS FOR INDUCTIVELY COUPLED PLASMA ANALYSIS

    公开(公告)号:JPH10111247A

    公开(公告)日:1998-04-28

    申请号:JP26754696

    申请日:1996-10-08

    Inventor: ITOU TETSUMASA

    Abstract: PROBLEM TO BE SOLVED: To conduct an analysis accurately by a method wherein an electrode being in contact with a sample solution is provided and kept at a ground potential and an electric charge generated by the friction caused when the sample solution passes through a sample introducing tube is discharged to the ground so as to prevent charging of the sample solution. SOLUTION: At the time when a sample solution passes through a sample introducing tube 2, an electric charge is generated in the sample solution by the friction caused between the sample solution and the inner wall of the sample introducing tube 2. This electric charge fluctuates the efficiency of atomization in an atomizer 1 and fluctuates an output signal of an analytical tube 9. A conductive electrode 2c is provided and one end thereof is brought into contact with the sample solution, while the other end is connected to a lead wire 2b to be grounded. The electric charge generated between the sample solution and the sample introducing tube 2 escapes to the ground through the lead wire 2b, since the conductive electrode 2c grounded to be at a ground potential is in contact with the sample solution. The sample solution is atomized stably without being charged, and thus an accurate analysis can be conducted.

    HEAT VAPORIZATION INDUCTIVELY COUPLED PLASMA MASS-SPECTROGRAPHIC DEVICE

    公开(公告)号:JPH06260134A

    公开(公告)日:1994-09-16

    申请号:JP4544493

    申请日:1993-03-05

    Inventor: ITOU TETSUMASA

    Abstract: PURPOSE:To lessen the rate of variation in the amount of adsorptive loss and obtain stable measurements. CONSTITUTION:A plasma mass-spectrographic device of heat vaporization inductively coupled type has a heating furnace 4 made of graphite in which a specimen solution is injected, and impurities are turned into atomic vapor by heating the furnace 4 at a high temp., and this atomic vapor is ionized by the induction coupling plasma to undergo mass segregation by a mass-spectrographic part 13, and thus sensing is made. Gas sumps 14 are provided in a transport path leading from the furnace 4 to a plasma torch 9 and on the carrier gas supply path of the furnace, wherein the capacity of the gas sump 14 is approx. five times as large as the capacity of the furnace 4, and the sump 14 is located in proximity to the furnace 4. This decreases remarkably the amount of atomic vapor adsorption to the furnace wall, enhances the sensitivity one order of magnitude up, and reduces the absolute amount of the adsorptive loss amount.

    4.
    发明专利
    失效

    公开(公告)号:JPH05290795A

    公开(公告)日:1993-11-05

    申请号:JP9303292

    申请日:1992-04-13

    Abstract: PURPOSE:To perform analysis regardless of a sample introduction method by putting an insulating material and a shielding plate between a plasma torch and a high-frequency coil and grounding them through a variable capacitor to control the plasma potential of ICP. CONSTITUTION:A shielding plate 10 is made up of metal tantalum, molybdenum or the like which has heat resistance and corrosion resistance against the radiation from an inductive coupling plasma (ICP) and passes the alternating field of a high-frequency coil 2 and is a non-magnetic material to make an open-loop so that an induced current does not flow, and also it is wound around a plasma torch 1 through an insulating material to be kept from being brought into contact with the coil 2. And the plate 10 is grounded to an analyzer tube 8 through a variable capacitor 11 and a switch 12. The switch is turned off to make ineffective the electric field shielding effect of ICP 9 at the time of being lighted and is turned on in the regular lighting to control the electric field shielding effect by adjusting the capacity of the capacitor 11.

    SPECTRUM ANALYZER
    6.
    发明专利

    公开(公告)号:JP2000258249A

    公开(公告)日:2000-09-22

    申请号:JP6555999

    申请日:1999-03-11

    Abstract: PROBLEM TO BE SOLVED: To obtain a spectrum analyzer easily imaging all wave lengths at a two-dimensional detector at a low price to measure every wavelength. SOLUTION: In a spectrum analyzer comprising a diffraction grating 7 diffracting incident light and an order dispersing element 4 further dispersing the diffracted light by the grating 7 every diffraction order, the grating 7 is placed in a diffraction face 14 and rotatably with a straight line 16 vertical to an inscribing line of the channel of the grating 7 as an axis.

    INDUCTIVELY COUPLED PLASMA MASS SPECTROMETER

    公开(公告)号:JPH10318984A

    公开(公告)日:1998-12-04

    申请号:JP13013397

    申请日:1997-05-20

    Inventor: ITOU TETSUMASA

    Abstract: PROBLEM TO BE SOLVED: To obtain a stabilized output signal by an arrangement wherein the rotary pump of an evacuation means for a first vacuum chamber also serves as the auxiliary pump for the turbo molecular pump of evacuation means for second and third vacuum chambers. SOLUTION: An ion lens 4 converges plus ions in a plasma passed through a skimmer orifice 3 and a mass spectrometer 6 performs determination. Second and third vacuum chambers 22, 23 have independent evacuation means, i.e., turbo molecular pumps 8, 9. The independent turbo molecular pumps 8, 9 are supplementally evacuated by a common auxiliary evacuation means, i.e., a rotary pump 10. The rotary pump 10 is coupled through a two-way valve 11 with a first vacuum chamber 21 and also serves as an evacuation means therefor. Since a steadily operating single rotary pump 10 is employed, heat is generated steadily and a control circuit subjected to the environmental temperature can function stably and a stabilized output signal can be obtained.

    PLASMA ION SOURCE MASS-SPECTROGRAPHIC DEVICE

    公开(公告)号:JPH0778590A

    公开(公告)日:1995-03-20

    申请号:JP22609893

    申请日:1993-09-10

    Abstract: PURPOSE:To make effective sensing of a minute quantity of impurities in a specimen by 90 deg. deflecting an ion beam having passed a sampling interface, and leading it to a mass filter. CONSTITUTION:A minute quantity of impurities in a specimen to be sensed are ionized in a plasma, turned into an ion beam upon passing through a sampling interface, and led along the sampling interface axis 13 into a 90-deg. deflector. The 90-deg. deflector is composed of quadripolar electrodes 20a, 20b, 20c, 20d, and a voltage of approx. 0.2Vav is impressed on the electrodes 20a, 20c while approx. 1.8Vav impressed on the other ones 20b, 20d, and the incident ion beam is deflected 90 deg. and emitted along the mass filter axis 17. The neutral component not ionized by the plasma advances straight to proceed to outside of the system, being free from risk of collision with any ion lens constituent member in the ion lens. Thereby a minute quantity of impurities in the specimen to be analyzed can be measured stably.

    INDUCED PLASMA MASS SPECTROGRAPH
    9.
    发明专利

    公开(公告)号:JPH06267497A

    公开(公告)日:1994-09-22

    申请号:JP4840093

    申请日:1993-03-09

    Abstract: PURPOSE:To lengthen the life of a detector in an induced plasma mass spectrograph, to widen the measuring range of highly concentrated impurity and to provide an inexpensive detecting system by changing the quantity of ions entered into the detector with the concentration of each of impurities measured so as to count the ions. CONSTITUTION:A perforated auxiliary electrode 30 which directs ions passing through a mass filter 10 to a detector 13 is arranged between the axis of the filter 10 and the detector 13, and a means which impresses voltages respectively upon a repeller 12 and the auxiliary electrode 30 is arranged to change voltage difference between the repeller 12 and the electrode 30 with the concentration of each of impurities measured. Also when the concentration of the impurity measured is high, potential difference between the repeller 12 and the auxiliary electrode 30 is increased more than that set when the low concentrated impurity was measured. This structure can lengthen the life of the detector 13, increase the measuring range of the highly concentrated impurity to that of about six figures and also provide an inexpensive detecting system.

    INDUCTION COUPLING PLASMA MASS SPECTROGRAPH

    公开(公告)号:JPH0696724A

    公开(公告)日:1994-04-08

    申请号:JP24208492

    申请日:1992-09-10

    Abstract: PURPOSE:To reduce the molecular ion to improve the performance for spectrographing iron or the like by flowing the nebulizer gas and the spray chamber gas (argon), of which flow quantity is controlled by a second flow quantity control unit, to the center of a plasma torch. CONSTITUTION:An adapter 4a of this device has the structure, to which a joint 14 is fitted to the side surface thereof, in addition to the structure for connecting a spray chamber 5 and a nebulizer 3. Besides the nebulizer gas, argon is flowed to the center of a plasma torch 7 by a second gas flow quantity control unit 13 through a tube 15, the joint 14 and the adapter 4a. With this structure, the structure of plasma (plasma temperature and electron density) is changed to make the condition hard to generate the molecular ion. As a result, blank level of an element such as iron and potassium, which receives the interference of the molecular ion, is reduced to improve the spectrographing performance remarkably.

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