公开(公告)号：JP2001208671A

公开(公告)日：2001-08-03

申请号：JP2000016806

申请日：2000-01-26

Applicant: SEIKO INSTR INC

Inventor： IYOGI MASATO

IPC: G01Q60/10 ,  G01Q60/22 ,  G01Q60/24 ,  G02B6/24 ,  G01N13/14 ,  G12B21/06

Abstract: PROBLEM TO BE SOLVED: To provide a method of forming openings which plastically deforms or breaks an optical fiber probe for a scanning near-field microscope and the end of a cantilever having a microscopic opening, providing a desired diameter of the opening with good reproducibility and permitting fine-tuning of the force required for plastically deforming or breaking the end. SOLUTION: Using an atomic force or shear force working between the optical fiber probe or the probe end of the cantilever having the microscopic opening and a sample, or a tunnel current and evanescent light, the probe end and the sample are brought close to or contacted with each other, and the force applied to the probe end is controlled, using either of these physical quantities as a parameter. The probe end is plastically deformed or broken by the force exerted from the sample surface, to form an opening of the desired diameter in the end.

公开(公告)号：JP2001116677A

公开(公告)日：2001-04-27

申请号：JP29908499

申请日：1999-10-21

Applicant: SEIKO INSTR INC

Inventor： IYOGI MASATO

IPC: G01L1/22 ,  G01B21/30 ,  G01Q10/04 ,  G01Q10/06 ,  G01Q60/36 ,  G01Q90/00 ,  G01N13/10

Abstract: PROBLEM TO BE SOLVED: To enhance rigidity of XY slow motion mechanisms, to improve a scanning speed, and to miniaturize a device without narrowing a scanning area in a scanning probe microscope. SOLUTION: XY slow motion mechanisms 6, 12 of a scanning probe microscope are arranged on both the sample side and the cantilever side, both XY slow motion mechanisms 6, 12 are independently operated, and a probe 1a and a sample 2 are releatively scanned.

公开(公告)号：JP2002243618A

公开(公告)日：2002-08-28

申请号：JP2001039085

申请日：2001-02-15

Applicant: SEIKO INSTR INC

Inventor： IYOGI MASATO

IPC: G01Q10/04 ,  G01Q60/18 ,  G01Q60/20 ,  G01Q60/22 ,  G01N13/14

Abstract: PROBLEM TO BE SOLVED: To obtain a measuring method with satisfactory efficiency in collecting light in illumination reflection mode in a scanning near-field microscope. SOLUTION: While a probe is shaken in the vertical directions with respect to a sample, light incident onto the probe is modulated. The light is irradiated from the tip of the probe at a location, at which the tip of the probe is farther from the sample than it is closest to the sample and is reflected light from the sample at the time is locked in and detected.

公开(公告)号：JP2002310881A

公开(公告)日：2002-10-23

申请号：JP2001117210

申请日：2001-04-16

Applicant: SEIKO INSTR INC

Inventor： IYOGI MASATO

IPC: G01Q20/02 ,  G01Q60/18 ,  G01Q60/22 ,  G01N13/14 ,  G12B21/06

Abstract: PROBLEM TO BE SOLVED: To provide a device with favorable operability and efficient irradiation and condensing and preventing displacement detection light of a cantilever from becoming noise of a light signal in a scanning near field microscope using a cantilever having a microscopic aperture in a tip. SOLUTION: The scanning near field microscope is composed of the cantilever 1 having a microscopic aperture in the tip, an optical displacement detecting means 7 having a light source 8 and a detector 9 for detecting displacement of the cantilever, a fine adjustment mechanism 15 for controlling the distance between a sample 14 and a probe tip, a coarse adjustment mechanism 34 bringing the sample 14 and the probe tip close together, and photodetectors 22 and 31 for detecting a light signal transmitted or reflected from a sample surface. Light from the light source 8 of the optical displacement detecting means 7 is condensed on a back face of the cantilever 1, a part of the light is introduced to the probe tip, and it is used in an excitation light source for producing a near field.

公开(公告)号：JPH11337560A

公开(公告)日：1999-12-10

申请号：JP14811798

申请日：1998-05-28

Applicant: SEIKO INSTR INC

Inventor： IYOGI MASATO

IPC: G01B21/30 ,  G01N37/00 ,  G01Q60/18 ,  G01Q60/24 ,  G01Q60/32 ,  G01Q60/38 ,  G01Q70/02

Abstract: PROBLEM TO BE SOLVED: To make Q value of a cantilever controllable in a cantilever holder part of a scanning type probe microscope. SOLUTION: Concerning this scanning type probe microscope, when a cantilever, having a minute probe on the tip, is shaken and simultaneously made to approach a sample, the amplitude of the cantilever is made to change by a physical characteristic working between the probe and the surface of the sample, and the surface shape of the sample is measured by the changed quantity of the amplitude at that time. In this case, such formation is applied that a first actuator 3 is fixed on a board 2, and a cantilever 5 is loaded so that shaking force of the first actuator 3 will be transmitted to the cantilever 5, and a plate part 5b of the cantilever 5 is contacted with an elastic member 7, and a second actuator 4 is interposed on the other plate 5a side, and the cantilever 5 is pushed down to the elastic member 7 by the second actuator 4.

公开(公告)号：JP2000304755A

公开(公告)日：2000-11-02

申请号：JP10978799

申请日：1999-04-16

Applicant: SEIKO INSTR INC

Inventor： IYOGI MASATO

IPC: G01B11/30 ,  G01N37/00 ,  G01Q10/04 ,  G01Q60/18

Abstract: PROBLEM TO BE SOLVED: To prevent the deviation of focus of an objective lens at the time of approaching action or during the measuring, by operating an objective lens fine moving mechanism to match with the operation of a Z-fine moving mechanism, and controlling a focal position of the lens constant. SOLUTION: An objective lens 5 is focused on the surface of a sample 3 by using a rough moving mechanism of the lens 5. The distance between the end of a probe 6 and the sample 3 is controlled by operating a Z-fine moving mechanism 21 so that the amplitude of a resonance frequency becomes constant when the probe 6 is made to approach to the sample 3. Then, after the sample 3 and the probe 6 are made to approach to an area where an interatomic force is operated between the ends of the sample 3 and the probe 6, the distance is controlled so that the distance between the sample 3 and the probe 6 becomes an optimum operation point. Then, since a focal position focused before measuring deviated by an operating amount of the mechanism 21, an objective lens finely moving mechanism 9 is changed by a moved amount of the mechanism 21 to correct so that the lens 5 is focused at an ignition point of the probe 6 at the stage in which approaching is completed.

公开(公告)号：JP2000081443A

公开(公告)日：2000-03-21

申请号：JP16433399

申请日：1999-06-10

Applicant: SEIKO INSTR INC

Inventor： IYOGI MASATO ,  HASEGAWA MASAO ,  TOMITA EISUKE

IPC: G01B7/34 ,  G01B5/28 ,  G01B7/00 ,  G01N37/00 ,  G01Q10/02 ,  G01Q10/04 ,  G01Q20/04 ,  G01Q60/22 ,  G01Q60/24 ,  G01Q60/32 ,  G01Q70/02 ,  G01Q70/10 ,  G01Q90/00

Abstract: PROBLEM TO BE SOLVED: To provide a method for joining a probe to a detecting piezoelectric element in a scanning probe microscope that uses a piezoelectric element as the distance control means of the probe, without depending on changes in ambient condition, such as temperature, and the amount of an adhesive or a method of adhesion, so that stable vibration characteristic and detection characteristic can be obtained and so that the detecting piezoelectric element can be reused. SOLUTION: In this microscope, a probe 1 is joined to a detecting piezoelectric element 3 by the spring pressure of an elastic material, and the detecting piezoelectric element 3 is tilted relative to the probe 1 within a mating surface so that the area of contact of the junction between the probe and the detecting piezoelectric element 3 is made smaller than if they are joined together with the direction of the axis of the probe 1 almost parallel to the longitudinal direction of the beam of the detecting piezoelectric element 3.