公开(公告)号：JPH0996624A

公开(公告)日：1997-04-08

申请号：JP25413695

申请日：1995-09-29

Applicant: SEIKO INSTR INC

Inventor： NAKAGAWA YOSHITOMO ,  HASEGAWA MASAO ,  ITOU TETSUMASA

IPC: G01N27/62 ,  H01J49/06 ,  H01J49/42

Abstract: PROBLEM TO BE SOLVED: To allow even an unskilled person to detect ions stably, by obtaining data of position and shape of ion beams entering a mass filter, and controlling voltage impressed to each electrode of an ion lens based on the data so that the beams enter the mass filter in an optimum state of the position and shape. SOLUTION: Scanning signals Dx, Dy fed to each scanning electrode 21a-21d are changed to move a position of a beam-scanning spot 24. Ions entering an entrance hole 23 are separated and detected by a mass filter 8, and counted at a data-processing part. When the counting at the data-processing part is synchronized with the signals Dx, Dy, data of a position and a shape of beams entering the filter 8 when the beams are not deflected by the signals Dx, Dy are obtained. The voltage of an electrode 7b of an ion lens 7 and then a coefficient (k) of a voltage to be impressed to a deflector 20 are sequentially changed. A value when a beam diameter becomes minimum, an asigmatism becomes minimum and a counting rate of peaks becomes maximum is set to be optimum. Accordingly, even an unskilled person can optimize easily.

公开(公告)号：JP2000081443A

公开(公告)日：2000-03-21

申请号：JP16433399

申请日：1999-06-10

Applicant: SEIKO INSTR INC

Inventor： IYOGI MASATO ,  HASEGAWA MASAO ,  TOMITA EISUKE

IPC: G01B7/34 ,  G01B5/28 ,  G01B7/00 ,  G01N37/00 ,  G01Q10/02 ,  G01Q10/04 ,  G01Q20/04 ,  G01Q60/22 ,  G01Q60/24 ,  G01Q60/32 ,  G01Q70/02 ,  G01Q70/10 ,  G01Q90/00

Abstract: PROBLEM TO BE SOLVED: To provide a method for joining a probe to a detecting piezoelectric element in a scanning probe microscope that uses a piezoelectric element as the distance control means of the probe, without depending on changes in ambient condition, such as temperature, and the amount of an adhesive or a method of adhesion, so that stable vibration characteristic and detection characteristic can be obtained and so that the detecting piezoelectric element can be reused. SOLUTION: In this microscope, a probe 1 is joined to a detecting piezoelectric element 3 by the spring pressure of an elastic material, and the detecting piezoelectric element 3 is tilted relative to the probe 1 within a mating surface so that the area of contact of the junction between the probe and the detecting piezoelectric element 3 is made smaller than if they are joined together with the direction of the axis of the probe 1 almost parallel to the longitudinal direction of the beam of the detecting piezoelectric element 3.

公开(公告)号：JPH09101258A

公开(公告)日：1997-04-15

申请号：JP26023395

申请日：1995-10-06

Applicant: SEIKO INSTR INC

Inventor： HASEGAWA MASAO

IPC: G01N21/31

Abstract: PROBLEM TO BE SOLVED: To enable an atomic absorption spectrophotometer to stably measure absorbancy with high sensitivity without position adjustment while suppressing the overall deformation by providing recessed sections or holes in the metal board heater of a metallic furnace. SOLUTION: Recessed sections 20 are formed near the outward bent section 21 of a metal board heater 15. The sections 20 are formed at thermal stress concentrating locations at the center of the heater 15 in the direction parallel to the optical axis 16. When the locations are deviated to either side from the optical axis 16, the heater 15 is twisted in the deviating direction and, in the direction perpendicular to the optical axis 16, a larger effect can be obtained as going toward the section 21 and, when the distance from the section 21 becomes about 1/10 of the length of the heater 15 in the direction parallel to the optical axis 16 or longer, the effect becomes smaller. While the same effect can be obtained even when holes are provided in place of the sections 20, the diameters of the holes must be decided carefully, because the resistance value becomes higher and the temperature distribution changes when the diameters become larger. When the sections 20 or holes are provided in such a way, high- sensitivity measurement can be made stably without position adjustment even when the heater 15 is made longer in the direction parallel to the optical axis 16.

公开(公告)号：JP2001230460A

公开(公告)日：2001-08-24

申请号：JP2000034833

申请日：2000-02-14

Applicant: SEIKO INSTR INC

Inventor： SUZUKI HIROYUKI ,  HASEGAWA MASAO

IPC: G01T1/24 ,  C23F4/00 ,  C25D11/18 ,  C25F3/20 ,  H01L21/316 ,  H01L39/24

Abstract: PROBLEM TO BE SOLVED: To manufacture a tunnel oxide film of high quality on the surface of a bulk superconductor. SOLUTION: A bulk aluminum material is anodized. After that, oxygen ions are irradiated. As a result, the tunnel oxide film is manufactured.

公开(公告)号：JP2001119059A

公开(公告)日：2001-04-27

申请号：JP30116699

申请日：1999-10-22

Applicant: SEIKO INSTR INC

Inventor： HASEGAWA MASAO

IPC: H01L31/09 ,  G01T1/24

Abstract: PROBLEM TO BE SOLVED: To prevent problems that a stress is imposed on a Josephson junction and the junction may be broken down due to a wiring method by wire bonding and that a connection state may change, before being cooled to a cryogenic temperature due to a mechanical contact method. SOLUTION: An oxide film is formed on a side surface of a pillar-like superconductor body 3. A superconductor thin film is provided on the oxide film. In a radiation detecting device in which a Josephson junction is formed, a superconductor thin film 5 is formed both on the pillar-like superconductor body 3 on which the oxide film is formed and a superconducting wiring material 4 to connect these to each other.

公开(公告)号：JP2000329697A

公开(公告)日：2000-11-30

申请号：JP2000014059

申请日：2000-01-19

Applicant: SEIKO INSTR INC

Inventor： HASEGAWA MASAO

IPC: G01N21/73

Abstract: PROBLEM TO BE SOLVED: To measure the intensity of many wavelengths in a short time by a method wherein a light dividing device is arranged on an optical axis so that spectrally diffracted light before being image-formed is divided into separate directions and a plurality of light cutoff devices and two-dimensional-face detectors are provided on optical paths of divided beams of light. SOLUTION: Light which is emitted from a plasma 1 is condensed on an entrance slit 3 by a lens 2, and it is changed into a beam of parallel light by a collimating mirror 4. The beam of parallel light is spectrally diffracted by a grating 5, and beams of spectrally diffracted light are image-formed by a camera mirror 6. A light dividing device 7 is arranged on a light path immediately before the beams of spectrally diffracted light are image-formed. Transmitted light passes a light cutoff device A8 so as to be image-formed on a two-dimensional-face detector A9. Reflected light passes a light cutoff device B10 so as to be image-formed on a two-dimensional-face detector B11. When a plurality of beams of light to be analyzed are measured, the light cutoff device A8 is opened and shut, the grating 5 is driven so as to move a wavelength while an electric charge is being read out after the exposure of the two-dimensional- face detector A9 is finished. After that, the light cutoff device B10 is opened and shut, and the two-dimensional-face detector B11 is exposed.

公开(公告)号：JP2002344038A

公开(公告)日：2002-11-29

申请号：JP2001151179

申请日：2001-05-21

Applicant: SEIKO INSTR INC

Inventor： HASEGAWA MASAO ,  SUZUKI HIROYUKI

IPC: G01T1/24 ,  H01L27/14 ,  H01L39/22

Abstract: PROBLEM TO BE SOLVED: To solve the problem of quasiparticles diffusing in to diminish a signal current because wiring is large in the cross-sectional area, and the number of recombined quasiparticles becoming larger than that of diffused quasiparticles due to work strain, when a bulk superconductor is cut off mechanically in a bulk superconductive X-ray detector. SOLUTION: A bulk superconductor is cut off by the use of an oxygen molecular ion beam, whereby it can be kept free of manufacture distortions, and wiring can be reduced in cross-sectional area.