公开(公告)号：US20150206738A1

公开(公告)日：2015-07-23

申请号：US14159970

申请日：2014-01-21

Applicant: SEMATECH, Inc.

Inventor： Abbas Rastegar

IPC: H01L21/02 ,  B08B3/12

CPC classification number: B08B3/12 ,  B06B1/0276 ,  B06B1/0622 ,  B06B2201/71 ,  C11D11/0047 ,  C11D11/007 ,  H01L21/67051

Abstract: An apparatus, system, and method for cleaning surfaces is presented. One embodiment of the system includes an array of surface acoustic wave (SAW) transducers coupled to a substrate. The system may include a positioning mechanism coupled to at least one of a target surface or the array of SAW transducers, and configured to position the array of SAW transducers within an effective cleaning distance of a target surface. The system may also include a cleaning liquid supply arranged to provide cleaning liquid for coupling the array of SAW transducers to the target surface. The system may further include a controller coupled to the array of SAW transducers and configured to activate the array of SAW transducers. At least one of the SAW transducers may be formed to focus cleaning liquid on a focal point and jet cleaning liquid in a direction substantially out of the place of the SAW transducer.

Abstract translation: 提出了一种用于清洁表面的设备，系统和方法。 该系统的一个实施例包括耦合到衬底的表面声波（SAW）传感器的阵列。 该系统可以包括耦合到目标表面或SAW换能器阵列中的至少一个的定位机构，并且被配置为将SAW换能器阵列置于目标表面的有效清洁距离内。 该系统还可以包括布置成提供用于将SAW换能器阵列耦合到目标表面的清洁液体的清洁液体供应。 该系统还可以包括耦合到SAW换能器阵列并被配置为激活SAW换能器阵列的控制器。 可以形成至少一个SAW换能器，以将清洁液体聚焦在焦点上，并将射流清洁液体基本上不在SAW换能器的位置。

公开(公告)号：US20140123997A1

公开(公告)日：2014-05-08

申请号：US14035709

申请日：2013-09-24

Applicant: Sematech, Inc.

Inventor： Abbas Rastegar

IPC: H01L21/67 ,  H01L21/02

CPC classification number: H01L21/67046 ,  B06B1/0276 ,  B06B1/0622 ,  B06B2201/20 ,  B06B2201/55 ,  B06B2201/71 ,  B08B3/12 ,  H01L21/02041

Abstract: An apparatus, system, and method for a Gigasonic Brush for cleaning surfaces is presented. One embodiment of the system includes an array of acoustic transducers coupled to a substrate where the individual acoustic transducers have sizes in the range of 9 um2 to 250,000 um2. The system may include a positioning mechanism coupled to at least one of a target surface or the array of acoustic transducers, and configured to position the array of acoustic transducers within 1 millimeter of a target surface. The system may also include a cleaning liquid supply arranged to provide cleaning liquid for coupling the array of acoustic transducers to the target surface. The system may further include a controller coupled to the array of acoustic transducers and configured to activate the array of acoustic transducers.

Abstract translation: 介绍了一种用于清洁表面的Gigasonic Brush的设备，系统和方法。 该系统的一个实施例包括耦合到衬底的声学换能器阵列，其中各个声学换能器的尺寸在9um2至250,000um2的范围内。 系统可以包括耦合到目标表面或声换能器阵列中的至少一个的定位机构，并且被配置为将声换能器阵列定位在目标表面的1毫米内。 该系统还可以包括布置成提供用于将声换能器阵列耦合到目标表面的清洁液体的清洁液体供应。 系统还可以包括耦合到声换能器阵列并被配置为激活声换能器阵列的控制器。