公开(公告)号：US12046574B2

公开(公告)日：2024-07-23

申请号：US17767914

申请日：2021-06-14

Applicant: SHINKAWA LTD.

Inventor： Yuhei Ito ,  Nobuyuki Aoyagi ,  Mitsuaki Sakakura ,  Takuya Asami ,  Hikaru Miura

IPC: B23K20/00 ,  B23K20/10 ,  H01L23/00 ,  B23K101/40

CPC classification number: H01L24/78 ,  B23K20/002 ,  B23K20/10 ,  B23K20/005 ,  B23K2101/40 ,  H01L2224/78301 ,  H01L2224/78353

Abstract: An ultrasonic horn (50) includes: a vibration source part (53) to which an ultrasonic vibrator (58) is mounted; a tip end part (56) to which a capillary (18) is mounted; and an intermediate part (54) which is interposed between the tip end part (56) and the vibration source part (53) and propagates vibration generated by the ultrasonic vibrator (58) to the tip end part (56). The intermediate part (54) is formed with a single spiral hole (68) which is a hole penetrating in a radial direction of the ultrasonic horn (50) and advances in an axial direction as the spiral hole advances in a circumferential direction.

公开(公告)号：US11691214B2

公开(公告)日：2023-07-04

申请号：US17503343

申请日：2021-10-17

Applicant: SHINKAWA LTD.

Inventor： Hiroshi Munakata ,  Yuhei Ito ,  John Ditri ,  Moe Tehrani

IPC: B23K20/10 ,  B23K20/00 ,  B23K101/40

CPC classification number: B23K20/10 ,  B23K20/004 ,  B23K2101/40

Abstract: An ultrasound horn is provided which vibrates a bonding tool, attached at a tip, in a plurality of directions with a simple structure. There is provided an ultrasound horn having: a longitudinal vibration generator; a horn portion; and a torsional vibration generator. The torsional vibration generator includes a body including a polygonal pillar portion, second layered elements in which a plurality of second piezoelectric elements are layered, and which are attached to side surfaces of the polygonal pillar portion, weights, and a pressure application ring which applies a pressure by pressing the second piezoelectric elements against the polygonal pillar portion via the weights.