公开(公告)号：SG179018A1

公开(公告)日：2012-04-27

申请号：SG2012015855

申请日：2010-09-08

Applicant: SI WARE SYSTEMS

Inventor： KHALIL DIAA A ,  MORTADA BASSEM ,  NABIL MOHAMED ,  MEDHAT MOSTAFA ,  SAADANY BASSAM A

Abstract: A Micro Electro-Mechanical System (MEMS) spectrometer architecture compensates for verticality and dispersion problems using balancing interfaces. A MEMS spectrometer/interferometer includes a beam splitter formed on a first surface of a first medium at an interface between the first medium and a second medium, a first mirror formed on a second surface of the first medium, a second mirror formed on a third surface of the first medium and balancing interfaces designed to minimize both a difference in tilt angles between the surfaces and a difference in phase errors between beams reflected from the first and second mirrors.