公开(公告)号：WO2011091012A3

公开(公告)日：2011-09-09

申请号：PCT/US2011021681

申请日：2011-01-19

Applicant: SI WARE SYSTEMS ,  SAADANY BASSAM A ,  KHALIL DIAA A

Inventor： SAADANY BASSAM A ,  KHALIL DIAA A

IPC: G01B9/02 ,  G01J3/453

CPC classification number: G01J3/0256 ,  G01B9/02044 ,  G01B9/02091 ,  G01B2290/35 ,  G01J3/4535

Abstract: An interferometer includes a variable optical path length reference mirror to produce a final interferogram from a combination of interferograms. Each of the interferograms is generated at a different optical path length of the reference mirror.

Abstract translation: 干涉仪包括可变光程长度参考镜，以从干涉图的组合产生最终干涉图。 每个干涉图在参考镜的不同光程长度上产生。

公开(公告)号：SG179018A1

公开(公告)日：2012-04-27

申请号：SG2012015855

申请日：2010-09-08

Applicant: SI WARE SYSTEMS

Inventor： KHALIL DIAA A ,  MORTADA BASSEM ,  NABIL MOHAMED ,  MEDHAT MOSTAFA ,  SAADANY BASSAM A

Abstract: A Micro Electro-Mechanical System (MEMS) spectrometer architecture compensates for verticality and dispersion problems using balancing interfaces. A MEMS spectrometer/interferometer includes a beam splitter formed on a first surface of a first medium at an interface between the first medium and a second medium, a first mirror formed on a second surface of the first medium, a second mirror formed on a third surface of the first medium and balancing interfaces designed to minimize both a difference in tilt angles between the surfaces and a difference in phase errors between beams reflected from the first and second mirrors.