公开(公告)号：AU2017200337A1

公开(公告)日：2017-08-10

申请号：AU2017200337

申请日：2017-01-18

Applicant: SILCOTEK CORP

Inventor： VEZZA THOMAS F ,  CONDO STEVEN A ,  DESKEVICH NICHOLAS P ,  MATTZELA JAMES B ,  SILVIS PAUL H

IPC: C23C16/455 ,  C23C16/02 ,  C23C16/24

Abstract: Thermal chemical vapor deposition coated articles and thermal chemical vapor deposition processes are disclosed. The article includes a substrate and a thermal chemical vapor deposition coating on the substrate. The thermal chemical vapor deposition coating includes properties from being produced by diffusion-rate-limited thermal chemical vapor deposition. The thermal chemical vapor deposition process includes introducing a gaseous species to a vessel and producing a thermal chemical vapor deposition coating on an article within the vessel by a diffusion-rate-limited reaction of the gaseous species. 107--,,. 115