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公开(公告)号:JPH0684132A
公开(公告)日:1994-03-25
申请号:JP23364592
申请日:1992-09-01
Applicant: SONY CORP
Inventor: TAKADA AKIO , TERUI SATOSHI , SATO HITOSHI , ISHIKAWA OSAMU
IPC: G11B5/31
Abstract: PURPOSE:To provide high permeability, to provide the stable structure of a magnetic domain in a front gap part, to provide the recording density for a magnetic recording medium having a high coercive force and to eliminate reproduction noises. CONSTITUTION:A lower-layer core 2 and an upper-layer core 5 comprising permalloy are formed on a substrate 1 through a gap spacer 3. Spiral coil conductors 4 and 6 are provided so as to surround a back gap part BG in this thin-film head. The amounts of the contents of Fe in the composition of the permalloy are different. The amount of the content in the back gap part BG is 17.5-18.5 atomic %, and that in a front gap part FG is 16.5-17.5 atomic %.
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公开(公告)号:JP2001155308A
公开(公告)日:2001-06-08
申请号:JP33673399
申请日:1999-11-26
Applicant: SONY CORP
Inventor: TERUI SATOSHI
IPC: G11B5/31
Abstract: PROBLEM TO BE SOLVED: To cope with high-density recording and to enhance reliability. SOLUTION: This thin film magnetic head has at least a lower core layer and an upper core layer which are laminated on a substrate. The projecting parts, which are provided respectively on both layers as a prescribed track width, are disposed oppositely to each other while interposing a nonmagnetic layer to form a magnetic gap. A depth controlling film is disposed to cover the lower core layer from the depth zero position at least to the back gap.
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公开(公告)号:JP2004281005A
公开(公告)日:2004-10-07
申请号:JP2003074265
申请日:2003-03-18
Inventor: TERUI SATOSHI , NIKAIDO MEGUMI , TAMAGAWA YUSUKE , SENDA YUKO
IPC: G11B5/31
Abstract: PROBLEM TO BE SOLVED: To provide a thin film magnetic head in which a magnetic head can be miniaturized without reducing recording characteristics, the yield can be improved, and which has a multi-track structure, and provide its manufacturing method.
SOLUTION: Magnetic core layers 13, 14, 23, 24 of upper and lower pairs being opposite through magnetic gaps FG1, FG2 are laminated by a plurality of stages through insulation films 20 between layers of non-magnetic, and the multi-track structure is formed perpendicularly to a lamination direction of these magnetic core layers. The upper part magnetic core layers 14, 24 of thin film magnetic head parts 10A, 10B in each stage are in a position relation in which they are deviated perpendicularly to the lamination direction, thereby, multi-track structure can be constituted.
COPYRIGHT: (C)2005,JPO&NCIPI-
公开(公告)号:JPH10198930A
公开(公告)日:1998-07-31
申请号:JP35070396
申请日:1996-12-27
Applicant: SONY CORP
Inventor: ASHISAKA SHINICHIROU , TERUI SATOSHI
Abstract: PROBLEM TO BE SOLVED: To provide a method for formation of conductors, which are not eroded by a wet etching liquid in a production process, and a process for producing a thin-film magnetic head. SOLUTION: Plating layers 20 are formed by forming resist frames 18A to be formed on a ground surface film 17 to a width W2 of 5 to 20μm. If these resist frames 18A are removed, grooves 21 of a width of 5 to 20μm are formed. A photoresist for forming a core cover 24 is evenly packed into the grooves 21 and the plating films 20 and ground surfaces 17, 16, 15 to be made to remain are sufficiently coated and are no more eroded by the wet etching liquid.
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公开(公告)号:JPH08329421A
公开(公告)日:1996-12-13
申请号:JP13442495
申请日:1995-05-31
Applicant: SONY CORP
Inventor: TERUI SATOSHI , NARISAWA KOSUKE , SUGANO YOSHIHIRO , SUZUKI TADAO
Abstract: PURPOSE: To prevent deterioration of the insulating property of a flattening layer and to improve a reliability by forming a conductive coil by plating, etching the film to remove the base layer of the plating film and ashing the flattening layer. CONSTITUTION: After a lower core 1 is formed on the upper part of an MR element 11, a flattening layer 5 is formed on the core 1 through a gap film 4. On the flattening layer 5, a base layer for plating having a two-layer structure is formed by sputtering by using Cr/Cu as the material. Then a film for a conductive coil 2 is formed on the base layer. The base layer in the area where the coil 2 is not formed is removed by etching by ion milling method. Then the flattening layer 5 is subjected to plasma ashing by using oxygen gas.
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公开(公告)号:JP2004281004A
公开(公告)日:2004-10-07
申请号:JP2003074264
申请日:2003-03-18
Inventor: TERUI SATOSHI , NIKAIDO MEGUMI , TAMAGAWA YUSUKE , SENDA YUKO
IPC: G11B5/39
Abstract: PROBLEM TO BE SOLVED: To provide a magneto-resistance effect type thin film magnetic head corresponding to a multi-track type which can reproduce a recorded signal faithfully and is excellent in productivity, and provide its manufacturing method.
SOLUTION: Forming width of magneto-resistance effect elements 41, 42 are assumed to track width Tw seeing from s sliding plane side for a magnetic recording medium, the magneto-resistance effect elements 41, 42 are deviated mutually in the direction of track width through a shield magnetic film 22 consisting of a magnetic material and laminated by two layers or more. The shield magnetic film 22 is used both as an upper magnetic pole of the first magneto-resistance effect element 41 side and a lower magnetic pole of the second magneto-resistance effect element 42. By this constitution, a thin film magnetic head for reproduction corresponding to the multi-track can be constituted, invasion of needless magnetic flux for each magneto-resistance effect element 41, 42 can be prevented by the second shield magnetic film 22, and a reproduced signal being faithful to the recording signal can be outputted.
COPYRIGHT: (C)2005,JPO&NCIPI-
公开(公告)号:JP2001052308A
公开(公告)日:2001-02-23
申请号:JP22172999
申请日:1999-08-04
Applicant: SONY CORP
Inventor: SHIBAYAMA TETSUYA , TERUI SATOSHI
IPC: G11B5/31
Abstract: PROBLEM TO BE SOLVED: To provide a thin-film magnetic head, in which irregularities in the frame width of an upper-layer pole is excluded, and to provide a manufacturing method. SOLUTION: In this thin-film magnetic head 40, an upper-layer pole 46 is provided between a back yoke 44, which is formed on a conductor coil and a gap. When a resist frame 53, which is used to form the upper-layer pole 46, is formed by a photolithographic method, in such a way that the time which elapses until a photoresist is exposed and developed after it is coated, is maintained so as to be constant. Thereby, this thin-film magnetic head in which irregularities in the frame width of the upper-layer pole 46 are excluded and whose performance quality is superior can be obtained, and its manufacturing method can be obtained.
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公开(公告)号:JPH11167704A
公开(公告)日:1999-06-22
申请号:JP33300197
申请日:1997-12-03
Applicant: SONY CORP
Inventor: TERUI SATOSHI
IPC: G11B5/31
Abstract: PROBLEM TO BE SOLVED: To produce a thin-film magnetic head having a prescribed track width by preventing the adhesion of the etched matter of a first magnetic film to the flanks of a second magnetic film at the time of etching of the first magnetic film by an ion milling method at the time of producing the thin-film magnetic head of which the upper layer magnetic core comprises the first magnetic film and the second magnetic film. SOLUTION: At the time of patterning the first magnetic film 17 by the ion milling method using the second magnetic film 18 patterned to a core shape as a mask by the ion milling method, the one end edge in the track width direction of the second magnetic film 18 is covered with a resist and is diagonally irradiated with an ion beam toward the end edge on the opposite side of the second magnetic film 18 to etch the first magnetic film 17 of this part and after the resist is removed, the other end edge in the track width direction of the second magnetic film 18 is on the contrary coated with the resist and is diagonally irradiated with the ion beam toward the end edge on the opposite side of the second magnetic film 18 to etch the remaining first magnetic film 17.
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公开(公告)号:JPH07320230A
公开(公告)日:1995-12-08
申请号:JP10727894
申请日:1994-05-20
Applicant: SONY CORP
Inventor: TERUI SATOSHI
IPC: G11B5/31
Abstract: PURPOSE:To obtain a small-sized thin film magnetic head having a simple structure, high output and superior head efficiency. CONSTITUTION:A conductor coil 4 is formed so that the aspect ratio of the coil, that is, the ratio of the height (t) of a section of the coil to the width (w) is regulated to >=1.5. The ratio (t/w) is concretely represented by 3.8/2.5=1.52. The pitch (p) of the coil is regulated to
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公开(公告)号:JPH0757224A
公开(公告)日:1995-03-03
申请号:JP20416193
申请日:1993-08-18
Applicant: SONY CORP
Inventor: ASADA KAZUTOSHI , HAYATA YUTAKA , FUKUMOTO YASUSHI , TERUI SATOSHI
Abstract: PURPOSE:To suppress the Barkhausen noise and output fluctuation of the MR head and to make its performance higher and its size smaller. CONSTITUTION:The MR head is formed by disposing an MR magnetosensitive part 46 consisting of an MR element 44 and bias conductor 45 between a first thin-film magnetic core 49 and a second thin-film magnetic core 50, forming the thin-film magnetic core 50 disposed on the bias conductor 45 side of laminated films formed by laminating soft magnetic layers 51, 52 via a nonmagnetic layer 53 held therebetween and specifying the thickness T of this nonmagnetic layer 13 to T
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