公开(公告)号：JP2008158460A

公开(公告)日：2008-07-10

申请号：JP2006350345

申请日：2006-12-26

Applicant: Sony Corp ,  ソニー株式会社

Inventor： SHIBAYAMA TETSUYA

IPC: G02B5/30

Abstract: PROBLEM TO BE SOLVED: To provide a method of manufacturing polarizing element capable of obtaining a polarizing element which is excellent in a heat radiation characteristic, has a large area, has uniform in-plain spectral characteristic distribution and has high reliability.
SOLUTION: The method includes: a step of pressing a mold 21 against a resist layer 12a while heating a transparent quartz substrate 11a and a resist layer 12a to at least the temperature of softening the resist layer 12a, subsequently, cooling the resist layer 12b until the resist layer 12b is cured, thereafter, drawing the mold 21 and, thereby, forming the grid-like first irregularities 13 transferred from the mold 21 on the resist layer 12b; a step of etching the quartz substrate 11a by using the resist layer 12b as a mask and, thereby, forming the grid-like second irregularities 14 corresponding to the first irregularities 13 on the surface of a quartz substrate 11b; and a step of performing sputter-film forming for the surface of the quartz substrate 11b from an oblique direction and, thereby, forming an inorganic fine particle layer 15 on an apex or at least one side surface part of the second irregularities 14.
COPYRIGHT: (C)2008,JPO&INPIT

Abstract translation: 要解决的问题：为了提供一种能够获得具有优异的散热特性的偏振元件的偏振元件的制造方法，具有大面积，具有均匀的平坦光谱特性分布并且具有高可靠性。 解决方案：该方法包括：在将透明石英基板11a和抗蚀剂层12a加热至少使抗蚀剂层12a软化的温度之前，将模具21压靠在抗蚀剂层12a上的步骤，随后冷却抗蚀剂 层12b直到抗蚀剂层12b固化，然后拉出模具21，从而形成从模具21在抗蚀剂层12b上转移的格栅状的第一凹凸13; 通过使用抗蚀剂层12b作为掩模蚀刻石英衬底11a，从而在石英衬底11b的表面上形成与第一凹凸13相对应的格栅状的第二凹凸14; 以及从倾斜方向对石英基板11b的表面进行溅射成膜的步骤，从而在第二凹凸14的顶点或至少一个侧面部分上形成无机细粒层15.

版权所有（C）2008，JPO＆INPIT

公开(公告)号：JPH11316908A

公开(公告)日：1999-11-16

申请号：JP12491898

申请日：1998-05-07

Applicant: SONY CORP

Inventor： SASAKI SATOSHI ,  KUDO HISASHI ,  SHIBAYAMA TETSUYA

IPC: G11B5/31

Abstract: PROBLEM TO BE SOLVED: To decrease etching quantity of a 2nd pole which serves as a mask at the time of etching. SOLUTION: A method for manufacturing a thin-film magnetic head made by forming a 1st and a 2nd magnetic core so as to opposite to each other through a magnetic gap is provided with a 1st magnetic layer forming process for forming a 1st magnetic layer 4 becoming a 1st magnetic core on a base body, a nonmagnetic layer forming process for forming a nonmagnetic layer 6 becoming a magnetic gap on the 1st magnetic layer 4, a 2nd magnetic layer forming process for forming a 2nd magnetic layer 11 in a specific shape becoming a 2nd magnetic core on the nonmagnetic layer 6 and an etching process for making the nonmagnetic layer 6 and 1st magnetic layer 4 integrally in a specific shape by etching the nonmagnetic layer 6 and 1st magnetic layer 4 by using the 2nd magnetic layer as a mask. In the etching process, when the nonmagnetic layer 6 is etched, etching is carried out by reactive ion etching and when the 1st magnetic layer 4 is etched, etching is carried out by ion beam etching.

公开(公告)号：JP2011164091A

公开(公告)日：2011-08-25

申请号：JP2010269805

申请日：2010-12-02

Applicant: Sony Corp ,  ソニー株式会社

Inventor： TAKAHASHI KAZUO ,  SHIBAYAMA TETSUYA ,  HONDA JUNICHI

IPC: B81B3/00 ,  G01C19/56 ,  H01L41/08 ,  H01L41/09 ,  H01L41/18 ,  H01L41/187 ,  H01L41/22

CPC classification number: G01C19/5726 ,  G01C19/5747 ,  H01L41/08

Abstract: PROBLEM TO BE SOLVED: To provide a thin angular velocity sensor. SOLUTION: The angular velocity sensor 1 has: a vibrator section 101 containing a plurality of vibration sections actuated by the same drive signal in a first surface in two directions which are not parallel; and a frame body 102 supporting the vibrator section. The sensor is equipped with: a sensor element 100 which generates the signals corresponding to angular velocities around a first axis and a second axis along the first surface in predetermined two directions and to angular velocity around a third axis in the direction which intersects perpendicularly with the first surface; a self-excited oscillation circuit 201 which outputs the drive signal; a controller 200 which has a detection circuit outputting the angular velocities around the first, second and third axes based on the signal corresponding to each angular velocity; and a circuit board 400 having the sensor element and the controller mounted thereon. COPYRIGHT: (C)2011,JPO&INPIT

Abstract translation: 要解决的问题：提供一种薄的角速度传感器。 角速度传感器1具有振动部101，该振动部101包含由不同于两个方向的第一面的同一驱动信号驱动的多个振动部， 以及支撑振动部的框体102。 传感器配备有：传感器元件100，其产生对应于沿着预定的两个方向沿着第一轴线的第一轴线和第二轴线的角速度的信号，以及围绕与第三轴线垂直相交的方向的第三轴线的角速度 第一表面 输出驱动信号的自激振荡电路201; 控制器200具有检测电路，其基于对应于每个角速度的信号输出围绕第一，第二和第三轴的角速度; 以及安装有传感器元件和控制器的电路板400。 版权所有（C）2011，JPO＆INPIT

公开(公告)号：JP2005259213A

公开(公告)日：2005-09-22

申请号：JP2004066694

申请日：2004-03-10

Applicant: Sony Corp ,  ソニー株式会社

Inventor： SHIBAYAMA TETSUYA ,  KATAKURA TORU

IPC: G11B5/39

Abstract: PROBLEM TO BE SOLVED: To reduce an element resistance value and to reduce variations in resistance value among channels.
SOLUTION: A composite magnetic head 10 in which a magnetic head for reproduction and a magnetic head for recording are stacked and a multi-track magnetic head equipped with the same have a lead-out conductor LMR which is connected to a magnetoresistive effect element and led out and a lead-out conductor LIND which is led out of a coil constituting the magnetic head for recording, the lead-out conductor LMR being made thicker on the side where the lead-out conductor LIND is formed.
COPYRIGHT: (C)2005,JPO&NCIPI

Abstract translation: 要解决的问题：减少元件电阻值并减少通道之间电阻值的变化。 解决方案：复制磁头10，其中堆叠用于再现的磁头和用于记录的磁头，并且具有该磁头的多磁道磁头具有连接到磁阻效应的引出导体LMR 元件引出，以及从构成用于记录的磁头的线圈引出的引出导体LIND，引出导体LMR在形成引出导体LIND的一侧变厚。 版权所有（C）2005，JPO＆NCIPI

公开(公告)号：JP2010060621A

公开(公告)日：2010-03-18

申请号：JP2008223532

申请日：2008-09-01

Applicant: Sony Corp ,  ソニー株式会社

Inventor： YAMADA TAKATOSHI ,  SHIBAYAMA TETSUYA

IPC: G02B5/30 ,  G02F1/1335

Abstract: PROBLEM TO BE SOLVED: To provide a method for producing a polarizing element, which can easily obtain a polarizing element with a large area in which the distribution of the spectral characteristics in the plane is uniform and which has high reliability in a short time, and to provide a polarizing element produced with the method for producing a polarizing element. SOLUTION: The method for producing the polarizing element comprises: a photolithography step where a resist layer 13a is formed on either main face of a substrate 11a (c) transparent to visible light and in which a pair of confronted edge faces are respectively made into slopes where the other main face overflows to either main face, and ultraviolet light is made incident so as to be oblique to the surface of the resist layer 13a and also in such a manner that the incident optical flux face including the light flux of the ultraviolet light is made vertical to the faces made into the slopes, thus interference exposure (d) and development (e) are performed regarding the resist layer 13a; an etching step (f) where either main face side of the substrate 11a is subjected to etching to form a diffraction grating-shaped concavo-convex part 14 on either main face; and an inorganic fine particle layer-forming step (g) where an inorganic fine particle layer 15 is formed on the top or one side face part of the convex part in the concavo-convex part 14. COPYRIGHT: (C)2010,JPO&INPIT

Abstract translation: 解决的问题：提供一种偏振元件的制造方法，其可以容易地获得具有大面积的偏振元件，其中平面中的光谱特性的分布是均匀的并且在短时间内具有高的可靠性 并提供用偏振元件的制造方法制造的偏光元件。 解决方案：用于制造偏光元件的方法包括：光刻步骤，其中抗蚀剂层13a形成在对可见光透明并且一对面对面的面的基板11a（c）的任一主面上 制成斜面，其中另一个主面溢出到任一主面，并且使紫外光入射到与抗蚀剂层13a的表面倾斜的位置，并且还包括使包含光敏层的光通量的入射光通量面 紫外线与制成斜面的面垂直，因此对抗蚀剂层13a进行干涉曝光（d）和显影（e） 蚀刻步骤（f），其中衬底11a的任一主面经受蚀刻，以在主面上形成衍射光栅形凹凸部14; 和在凹凸部14的凸部的顶面或一侧面部形成无机细粒层15的无机细粒层形成工序（g）。（C）2010 ，JPO＆INPIT

公开(公告)号：JP2010014575A

公开(公告)日：2010-01-21

申请号：JP2008175445

申请日：2008-07-04

Applicant: Sony Corp ,  ソニー株式会社

Inventor： HONDA JUNICHI ,  INAGUMA TERUYUKI ,  SHIBAYAMA TETSUYA

IPC: G01C19/56 ,  G01C19/5628 ,  H01L41/08 ,  H01L41/187 ,  H01L41/22 ,  H01L41/312 ,  H01L41/332 ,  H01L41/338

CPC classification number: G01C19/5628 ,  G01C19/5621

Abstract: PROBLEM TO BE SOLVED: To provide an angular velocity sensor which is excellent in sensitivity and enables its productivity to be improved, and provide a method for manufacturing the same. SOLUTION: The method for manufacturing the angular velocity sensor includes respectively preparing a substrate 111 which has a thickness corresponding to that of a vibrator section 102, and a substrate 112 thicker than the substrate 111. An insulating film 112a is formed on the substrate 112. An aperture 90 is formed on the insulating film 112a in order to expose a surface of the substrate 112. The substrate 111 and the substrate 112 are laminated so as to sandwich the insulating film 112a. A piezoelectric layer 7 is formed on the substrate 111. The vibrator section 102 is formed in a region on the substrate 111 corresponding to a position on which the aperture 90 is formed. The substrate 111 and the substrate 112 are cut, thereby forming the outline of a base section 103. COPYRIGHT: (C)2010,JPO&INPIT

Abstract translation: 要解决的问题：提供灵敏度优异并且能够提高其生产率的角速度传感器，并提供其制造方法。 解决方案：用于制造角速度传感器的方法包括分别制备具有与振动部分102的厚度对应的厚度的基板111和比基板111厚的基板112.绝缘膜112a形成在 衬底112.在绝缘膜112a上形成孔90以暴露衬底112的表面。衬底111和衬底112被层压以夹住绝缘膜112a。 在基板111上形成压电层7.振动部102形成在与形成有孔90的位置对应的基板111的区域中。 基板111和基板112被切割，从而形成基部103的轮廓。版权所有：（C）2010，JPO＆INPIT

公开(公告)号：JP2001052308A

公开(公告)日：2001-02-23

申请号：JP22172999

申请日：1999-08-04

Applicant: SONY CORP

Inventor： SHIBAYAMA TETSUYA ,  TERUI SATOSHI

IPC: G11B5/31

Abstract: PROBLEM TO BE SOLVED: To provide a thin-film magnetic head, in which irregularities in the frame width of an upper-layer pole is excluded, and to provide a manufacturing method. SOLUTION: In this thin-film magnetic head 40, an upper-layer pole 46 is provided between a back yoke 44, which is formed on a conductor coil and a gap. When a resist frame 53, which is used to form the upper-layer pole 46, is formed by a photolithographic method, in such a way that the time which elapses until a photoresist is exposed and developed after it is coated, is maintained so as to be constant. Thereby, this thin-film magnetic head in which irregularities in the frame width of the upper-layer pole 46 are excluded and whose performance quality is superior can be obtained, and its manufacturing method can be obtained.

公开(公告)号：JP2006127716A

公开(公告)日：2006-05-18

申请号：JP2004318462

申请日：2004-11-01

Applicant: Sony Corp ,  ソニー株式会社

Inventor： SHIBAYAMA TETSUYA ,  KATAKURA TORU

IPC: G11B5/39 ,  H01L43/08

Abstract: PROBLEM TO BE SOLVED: To provide a thin film magnetic head provided with a magneto-resistance effect type magnetic head element in which disturbance of magnetic domain structure in a magnetic shield layer by a high saturation magnetic flux density material is suppressed and occurrence of Barkhausen noise is suppressed, and its manufacturing method.
SOLUTION: In this thin film magnetic head, the magnetic shield layer 34 of the magneto-resistance effect type magnetic head element is formed by a frame plated layer made by using a frame 12 with the frame width larger than 4.0 μm and less than 9.0 μm, and the magnetic shield layer 34 is formed by the high saturation magnetic flux density material.
COPYRIGHT: (C)2006,JPO&NCIPI

Abstract translation: 要解决的问题：提供一种具有磁阻效应型磁头元件的薄膜磁头，其中通过高饱和磁通密度材料抑制磁屏蔽层中的磁畴结构的扰动并发生 的巴克豪森噪音被抑制，其制造方法。 解决方案：在该薄膜磁头中，磁阻效应型磁头元件的磁屏蔽层34由框架电镀层形成，框架镀层通过使用框架宽度大于4.0μm的框架12而制成 并且磁屏蔽层34由高饱和磁通密度材料形成。 版权所有（C）2006，JPO＆NCIPI

公开(公告)号：JPH11350171A

公开(公告)日：1999-12-21

申请号：JP15481998

申请日：1998-06-03

Applicant: SONY CORP

Inventor： SASAKI SATOSHI ,  KUDO HISASHI ,  SHIBAYAMA TETSUYA

IPC: C23F4/00 ,  G11B5/31

Abstract: PROBLEM TO BE SOLVED: To uniformly irradiate a substrate with a beam and to eliminate the variation of the etching quantity within the substrate by largely repetitively turning the substrate in an intra-surface direction in an etching stage using the ion beam. SOLUTION: When the substrate is not turned, the substrate is irradiated with the ion beam 30 approximately parallel with the longs side on the upper surface of a second pole 8. The substrate is repetitively turned and moved back and forth between the position of 180 deg. in a plus direction and a position of 180 deg. in a minus direction. As the substrate is turned, the irradiation direction of the ion beam 30 with second pole 8 changes and the portion which is the shade of the second pole 8 changes accordingly. The direction where the irradiation direction of the ion beam 30 with the second pole 8 is successively varied by repetitively moving the substrate within a specified range. Even if, therefore, the shape of the second pile 8 is asymmetrical on the front side and the rear side, the uniform irradiation with the ion beam 30 is made possible.

公开(公告)号：JPH11316907A

公开(公告)日：1999-11-16

申请号：JP12491798

申请日：1998-05-07

Applicant: SONY CORP

Inventor： SASAKI SATOSHI ,  KUDO HISASHI ,  SHIBAYAMA TETSUYA

IPC: G11B5/31

Abstract: PROBLEM TO BE SOLVED: To provide a method for manufacturing a thin-film magnetic head whose the record fringing is reduced by preventing a nonmagnetic layer and a 1st magnetic body which are left at the time of trim etching and removed matters from being restuck. SOLUTION: This method is provided with a 1st magnetic body forming process for forming a 1st magnetic body 4 becoming a 1st magnetic core on a base body, a nonmagnetic layer forming process for forming a nonmagnetic layer 6 becoming a magnetic gap on the 1st magnetic body, a 2nd magnetic body forming process for forming a 2nd magnetic body 11 in a specific shape becoming a 2nd magnetic core on the nonmagnetic layer 6 and an etching process for making the nonmagnetic layer 6 and the 1st magnetic body 4 integrally in a specific shape by ion beam etching by using the 2nd magnetic body 11 as a mask. Then, in the etching process, 1st etching is carried out while the base body is slanted at a specific angle to the incidence direction of the ion beam and is repeatedly rotated within a specific angle range and 2nd etching is carried out while the base body is slanted within an angle range larger than that of the 1st etching and is repeatedly rotated within an angle range larger than that of the 1st etching.