公开(公告)号：EP1677074A4

公开(公告)日：2007-12-19

申请号：EP04792982

申请日：2004-10-20

Applicant: SONY CORP

Inventor： NAGATA MASAYA ,  NISHITAKE HIROSHI ,  FUKUMOTO KOJI ,  MATSUHISA KAZUHIRO ,  YASUI ATSUHITO

IPC: G01C19/56 ,  G01C19/5705 ,  G01C19/574 ,  G01C19/5769

CPC classification number: G01C19/5712

Abstract: An angular velocity detector capable of obtaining the high detection sensitivity of an angular velocity and simultaneously detecting two-axis-direction angular velocities by using an annular-thin-film vibrator to elaborately dispose an electrode. The detector comprises a vibrator (1101) floating at a constant space from the surface of a first substrate (1100) and provided via support elastic elements (an outer spring (1102) and an inner spring (1103)) supported on support parts (1105), (1106) formed on a first substrate (1123), exciting means (a magnet (1124) and a drive electrode (1108)) for exciting the vibrator (1101) in a constant exciting direction, and displacement detection means (a detection electrode (1109), an electrode (1120)) for detecting the displacement of the vibrator (1101) in a direction perpendicular to an exciting direction with respect to an angular velocity when the angular velocity acts from the outside with the vibrator (1101) kept vibrated in the exciting direction by the exciting means, the vibrator (1101) or an angular velocity detection unit including the vibrator (1101) being excited by electromagnetic driving.