ANGULAR VELOCITY DETECTOR, ANGULAR VELOCITY DETECTION METHOD BY ANGULAR VELOCITY DETECTOR AND PRODUCTION METHOD OF ANGULAR VELOCITY DETECTOR
    2.
    发明公开
    ANGULAR VELOCITY DETECTOR, ANGULAR VELOCITY DETECTION METHOD BY ANGULAR VELOCITY DETECTOR AND PRODUCTION METHOD OF ANGULAR VELOCITY DETECTOR 审中-公开
    角速度检测器,角速度探测方法的角速度检测器和方法角速度检测器

    公开(公告)号:EP1677074A4

    公开(公告)日:2007-12-19

    申请号:EP04792982

    申请日:2004-10-20

    Applicant: SONY CORP

    CPC classification number: G01C19/5712

    Abstract: An angular velocity detector capable of obtaining the high detection sensitivity of an angular velocity and simultaneously detecting two-axis-direction angular velocities by using an annular-thin-film vibrator to elaborately dispose an electrode. The detector comprises a vibrator (1101) floating at a constant space from the surface of a first substrate (1100) and provided via support elastic elements (an outer spring (1102) and an inner spring (1103)) supported on support parts (1105), (1106) formed on a first substrate (1123), exciting means (a magnet (1124) and a drive electrode (1108)) for exciting the vibrator (1101) in a constant exciting direction, and displacement detection means (a detection electrode (1109), an electrode (1120)) for detecting the displacement of the vibrator (1101) in a direction perpendicular to an exciting direction with respect to an angular velocity when the angular velocity acts from the outside with the vibrator (1101) kept vibrated in the exciting direction by the exciting means, the vibrator (1101) or an angular velocity detection unit including the vibrator (1101) being excited by electromagnetic driving.

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