Abstract:
The present technology relates to techniques of preventing intrusion of moisture into a chip. Various illustrative embodiments include image sensors that include: a substrate; a plurality of layers stacked on the substrate; the plurality of layers including a photodiode layer having a plurality of photodiodes formed on a surface of the photodiode layer; the plurality of layers including at least one layer having a groove formed such that a portion of the at least one layer is excavated; and a transparent resin layer formed above the photodiode layer and formed in the groove. The present technology can be applied to, for example, an image sensor.
Abstract:
An angular velocity detector capable of obtaining the high detection sensitivity of an angular velocity and simultaneously detecting two-axis-direction angular velocities by using an annular-thin-film vibrator to elaborately dispose an electrode. The detector comprises a vibrator (1101) floating at a constant space from the surface of a first substrate (1100) and provided via support elastic elements (an outer spring (1102) and an inner spring (1103)) supported on support parts (1105), (1106) formed on a first substrate (1123), exciting means (a magnet (1124) and a drive electrode (1108)) for exciting the vibrator (1101) in a constant exciting direction, and displacement detection means (a detection electrode (1109), an electrode (1120)) for detecting the displacement of the vibrator (1101) in a direction perpendicular to an exciting direction with respect to an angular velocity when the angular velocity acts from the outside with the vibrator (1101) kept vibrated in the exciting direction by the exciting means, the vibrator (1101) or an angular velocity detection unit including the vibrator (1101) being excited by electromagnetic driving.