Abstract:
An apparatus and method of fabrication for flexible pixelated Fabry-Perot filter. The flexible pixelated Fabry-Perot filter can include a first reflective layer, a second reflective layer, a Fabry-Perot cavity layer between the first reflective layer and the second reflective layer, wherein the Fabry-Perot cavity layer includes at least two regions of different cavity thickness, and a flexible substrate layer which structurally supports the first reflective layer, the Fabry-Perot cavity layer, and the second reflective layer. The flexible pixelated Fabry-Perot filter comprises, for example, random or specified mosaic arrangement of blocks, where each block has at least two counts of Fabry-Perot filter, which can act as pixel filters, having resonance transmissions in ultraviolet, visible or near/mid/far infrared regions. The constituent materials and their thicknesses allow the flexibility and fabrication. The flexible pixelated Fabry-Perot filter can be utilized in various applications ranging from color/multispectral imaging to digital color display.
Abstract:
Methods for replication and lift-off of micro/nanostructures in single or multilayer thin films from a master substrate at wafer scale. The methods utilize polymeric materials with low-elastomeric properties to enhance the mechanical strength of the thin films during the replication and liftoff process from a master substrate, wherein the flexible polymer can have stand alone integrity. The master substrate can contain a surface relief which has a desired pattern to be replicated.