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公开(公告)号：EP1912889B1
公开(公告)日：2015-09-02
申请号：EP06764923.6
申请日：2006-07-12
Applicant: SPP Process Technology Systems UK Limited
Inventor： APPLEYARD, Nicholas John , POWELL, Kevin
IPC: B81C1/00 , H01L21/3065 , H01L21/00 , B08B7/00
CPC classification number: B81C1/00547 , H01L21/67069
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