公开(公告)号：SG196768A1

公开(公告)日：2014-02-13

申请号：SG2013086244

申请日：2008-10-22

Applicant: ST MICROELECTRONICS GRENOBLE ,  ST MICROELECTRONICS SRL

Inventor： TENUCCI SERGIO ,  PAGANI ALBERTO ,  SPINETTA MARCO ,  RANCHOUX BERNARD

Abstract: - 26 -METHOD FOR AN IMPROVED CHECKING OF REPEATABILITY ANDREPRODUCIBILITY OF A MEASURING CHAIN, IN PARTICULAR FOR THEQUALITY CONTROL BY MEANS OF THE SEMICONDUCTOR DEVICETESTINGThe invention relates to a method for an improved checking ofrepeatability and reproducibility of a measuring chain, in particular for thequality control by means of the semiconductor device testing, wherein testing10steps are provided for multiple and different devices to be subjected tomeasurement through a measuring system comprising at least oneconcatenation of measuring units between a testing apparatus (ATE) and eachdevice to be subjected to measurement. Advantageously, the method comprisesthe following steps: checking repeatability and reproducibility of each type of15unit that forms part of the measuring chain of the concatenation; then makinga correlation between the various measuring chains as a whole to checkrepeatability and reproducibility, using a corresponding device subjected tomeasurement.20Fig. 7METHOD FOR AN IMPROVED CHECKING OF REPEATABILITY AND REPRODUCIBILITY OF AMEASURING CHAIN, IN PARTICULAR FOR THE QUALITY CONTROL BY MEANS OF THE The invention relates to amethod for an improved checking of repeatability and reproducibility of ameasuring chain, in particular for the 10 quality control by means of thesemiconductor device testing, wherein testing steps are provided for multipleand different devices to be subjected to measurement through a measuringsystem comprising at least one concatenation of measuring units between atesting apparatus (ATE) and each device to be subjected to measurement.Advantageously, the method comprises 15 the following steps: checkingrepeatability and reproducibility of each type of unit that forms part of themeasuring chain of the concatenation; then making a correlation between thevarious measuring chains as a whole to check repeatability andreproducibility, using a corresponding device subjected to measurement. 20Fig. 7