公开(公告)号：EP1889117A4

公开(公告)日：2017-01-11

申请号：EP06756198

申请日：2006-06-06

Applicant: ST MICROELECTRONICS INT NV

Inventor： KRYLOV SLAVA ,  MEDINA MOSHE ,  HUBER AVIGDOR ,  LALEZAR RONEN

IPC: G02F1/03 ,  G02B26/00 ,  G02B26/08 ,  G02F1/07

CPC classification number: G02B26/0841

Abstract: A MEMS apparatus for scanning an optical beam comprises a mirror operative to perform a rotational motion to a maximum rotation angle around a mirror rotation axis formed in a double active layer silicon-on-insulator (SOI) substrate. The apparatus may include a bouncing mechanism operative to provide a bouncing event and to reverse the rotational motion. The bouncing event provides the mirror with a piecewise linear response to actuation by intrinsically nonlinear electrostatic forces. In a particular embodiment, the bouncing mechanism includes a vertical comb drive stator built in the same active layer of the double active layer SOI substrate, while actuator comb drive stators are built in a different active layer.