公开(公告)号：JPH06258384A

公开(公告)日：1994-09-16

申请号：JP24132193

申请日：1993-09-28

Applicant: ST MICROELECTRONICS SRL

Inventor： PELLEGRINI FRANCO

IPC: G01R31/26 ,  G01R1/36 ,  G01R31/28 ,  H01L21/66

Abstract: PURPOSE: To perform a reliable precise test by providing a current sensor, and an electric resistance changing means to be integrated with it. CONSTITUTION: A metal strip 15 has a detecting resistor 6 having a resistance value RS formed in a part thereof, and is connected to the drain terminal of a transistor 2 and a first pad 17. A metal strip 18 is extended to form a detecting resistance 10 having a resistance value Rs1 , and ended in a second pad 19 to form an input terminal 13. The pad 19 is connected to the negative input of an arithmetic amplifier, and the positive input is connected to the strip 18 through a voltage source 7 having a voltage VR. The pad 19 is connected to a circuit element for carrying a variable current to the resistor 6 in a wafer test, a current ILI passing a transistor 2 is carried through the resistors 6, 10, and the interposing condition of limit loop is thus represented by the expression I. In a final test, a terminal 13 is floated, a current IL2 is carried only to the resistor 6, and the interposing condition of limit loop is thus represented by the expression II. The nominal currents measured in both the tests are determined by a magnification K represented by the expression III, and a high magnification can be also attained by the selection of Rs1 .

公开(公告)号：EP0590221B1

公开(公告)日：1997-12-29

申请号：EP92830543

申请日：1992-09-30

Applicant: ST MICROELECTRONICS SRL

Inventor： PELLEGRINI FRANCO

IPC: G01R31/26 ,  G01R1/36 ,  G01R31/28 ,  H01L21/66

CPC classification number: G01R31/2884 ,  G01R1/36

公开(公告)号：DE69223786T2

公开(公告)日：1998-05-07

申请号：DE69223786

申请日：1992-09-30

Applicant: ST MICROELECTRONICS SRL

Inventor： PELLEGRINI FRANCO

IPC: G01R31/26 ,  G01R1/36 ,  G01R31/28 ,  H01L21/66

Abstract: A measuring structure comprising a first resistor (6) for converting a current to be measured into a voltage, and an operational amplifier (5) for measuring the current. A second resistor (10), series connected to and integrated with the first resistor (6), is activated by an input terminal (13) solely at the wafer testing stage, so as to reduce, in relation to the nominal value, the current corresponding to a predetermined voltage value detected by the operational amplifier, and enable optimum correlation of the reduced current value obtainable during wafer testing and the corresponding nominal current value.

公开(公告)号：DE69223786D1

公开(公告)日：1998-02-05

申请号：DE69223786

申请日：1992-09-30

Applicant: ST MICROELECTRONICS SRL

Inventor： PELLEGRINI FRANCO

IPC: G01R31/26 ,  G01R1/36 ,  G01R31/28 ,  H01L21/66

Abstract: A measuring structure comprising a first resistor (6) for converting a current to be measured into a voltage, and an operational amplifier (5) for measuring the current. A second resistor (10), series connected to and integrated with the first resistor (6), is activated by an input terminal (13) solely at the wafer testing stage, so as to reduce, in relation to the nominal value, the current corresponding to a predetermined voltage value detected by the operational amplifier, and enable optimum correlation of the reduced current value obtainable during wafer testing and the corresponding nominal current value.