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1.发明专利
公开(公告)号：JPS6325918A
公开(公告)日：1988-02-03
申请号：JP11043887
申请日：1987-05-06
Applicant: STANDARD OIL CO OHIO
IPC: H01L31/04 , H01L21/265
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公开(公告)号：JPS63245963A
公开(公告)日：1988-10-13
申请号：JP27555287
申请日：1987-10-30
Applicant: STANDARD OIL CO OHIO
Inventor： MIROSURAFU ONDORISU , MAATEII EI PITSUCHIRAA
IPC: H01L31/04 , H01L31/073 , H01L31/18
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