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公开(公告)号:JPS63252427A
公开(公告)日:1988-10-19
申请号:JP114488
申请日:1988-01-06
Applicant: STANDARD OIL CO OHIO
Inventor: RUISU FURANKU SAABOO , UIRIAMU JIYOSEFU BITSUTAA
IPC: G06F9/455 , G06F9/34 , G06F9/44 , H01L21/28 , H01L21/443 , H01L31/0224 , H01L31/073 , H01L31/10