公开(公告)号：JPS6488245A

公开(公告)日：1989-04-03

申请号：JP17384588

申请日：1988-07-14

Applicant: STANFORD RES INST INT

Inventor： MARUKU JIEI MADOU ,  TAKAAKI OTAGAWA

IPC: G01N27/404 ,  G01N27/27 ,  G01N27/416 ,  G01N27/49

Abstract: PURPOSE: To achieve a prompt response by providing a substrate with an opening, a gas transmission detection electrode, and an additional electrode that contacts an electrolyte and is electrically insulated from the detection electrode and enabling a gas to be analyzed to reach the electrolyte at a gas phase. CONSTITUTION: A passage 18 is formed between surfaces 14 and 16 of a substrate 12, a gas transmission detection electrode 20 is arranged across the passage 18, and an electrolyte 26 is brought into contact with a dielectric layer 22 and a surface side 21 of the electrode 20. Also, a porous member 30 is arranged closer to the electrode 20 within the passage 18, at the same time a counter electrode 24 is arranged so that it contacts the electrolyte 26 and is insulated from the electrode 20, and a capsule is formed by a means 28. Then, for responding to various kinds of gas-shaped objects, the structure of the electrolyte 26 and the size of a hole in the electrode 20 are selected and a gas to be analyzed is passed through the hole of the electrode 20 in gaseous phase, thus achieving an extremely fast response time and a long life.

公开(公告)号：JPS6488354A

公开(公告)日：1989-04-03

申请号：JP17795688

申请日：1988-07-15

Applicant: STANFORD RES INST INT

Inventor： MARUKU JIEI MADOU ,  TAKAAKI OTAGAWA

IPC: G01N27/416 ,  G01N27/49

Abstract: PURPOSE: To improve response time and sensitivity by including detection, counter, and reference electrodes provided on a substrate and an active region of the substrate surface and securing a gap clearly between the detection and counter electrodes, between the detection and reference electrodes, and between the counter and reference electrodes. CONSTITUTION: A micro-sensor 10 has a substrate 12 with an active region 16 where an electrochemical reaction occurs and a substrate surface 14. A detection electrode 18 is provided on the substrate surface 14 and has a detection part 20 on the region 16. The detection part 20 has an inward surface 22 that faces the surface 14 and an outward surface 24 at the opposite side of the surface 14 and a plurality of outward extended parts 26 are formed on a surface 24. Then, a counter electrode 30 contacts an electrolyte medium 28 but does not contact the electrode 18. Then, a reference electrode 32 may contact the medium 28 but does not contact the electrodes 18 and 30. Then, a gap of approximately 50μm or less is formed between the electrodes 18 and 30, a gap 36 with approximately 100μm or less is formed between the electrodes 18 and 32, and a gap 38 is formed between the electrodes 32 and 30, thus improving response time and sensitivity.

公开(公告)号：JPS6480439A

公开(公告)日：1989-03-27

申请号：JP17795488

申请日：1988-07-15

Applicant: STANFORD RES INST INT

Inventor： MARUKU JIEI MADOU ,  KURISUTOFUA II HORANDO ,  YUUJIN AARU UESUTAABAAGU ,  TAKAAKI OTAGAWA

IPC: B01J19/00 ,  H01G9/00

Abstract: PURPOSE: To constitute electrochemical cells in a crystalline slab by laminating a conductive on a passage and sufficiently etching two front masking layers covering a front surface and well opposite to this passage, thereby exposing the conductor. CONSTITUTION: An electrolytic medium 50 is inserted by a suitable method into the well 28, in which case a device of an ink jet printer type is used and the insertion is executed by replacing the ink with the electrolytic medium 50 and paper with the slab 12 provided with the well 28. The electrolytic medium 50 may be liquid and may be a hydrogel as well, for which a solid conductive electrolyte is usable. A barrier 52 is usable in order to coat the well 28. An integrated circuit 54 is constituted on the rear surface of the slab 12. The integrated circuit 54 is electrically connected to the conductor 46, etc., and is eventually used as an adapter to treat the signal therefrom.

公开(公告)号：JPH01112149A

公开(公告)日：1989-04-28

申请号：JP17795588

申请日：1988-07-15

Applicant: STANFORD RES INST INT

Inventor： MARUKU JIEI MADOU ,  TAKAAKI OTAGAWA

IPC: G01N27/27 ,  B01J35/02 ,  G01N27/403 ,  G01N27/404

Abstract: PURPOSE: To obtain a fine electrochemical sensor that is useful for detecting various kinds of chemical substances with an extremely low concentration by forming a substrate in a single structure formed of a single material. CONSTITUTION: An electrode structure 10 has a monolithic substrate 12 and the substrate has a front surface 14 and a rear surface 16 that oppose each other while they are normally separated. A first well 18 is extended into the substrate 12 from the front surface 14 and is extended toward the rear surface 16. All required chemical substances of a cell 11 are located within the first well 18. The first well 18 contains anisotropic etching. A first electrode 24 is extended at least to the first well 18 between the front surface 14 and the rear surface 16. A first conductor 26 is provided at a first path 22 and a first electrode 24 is used to make electrical connection to the rear surface 16 adjacent to the substrate 12. The first conductor 26 is suited for an electron conductor as compared with an ion conductor or a well that opposes to the edge part 27 of the conductor 26 may take the place of the electrode 24, thus easily manufacturing the sensor 10.