公开(公告)号：EP0153525A1

公开(公告)日：1985-09-04

申请号：EP84304407.4

申请日：1984-06-28

Applicant: STAUFFER CHEMICAL COMPANY

Inventor： Baumann, John Andrew ,  Parry, Robert Walter ,  Schachter, Rozalie

IPC: B01D8/00 ,  B01J19/00 ,  F25J3/08

CPC classification number: B01D8/00 ,  B01J2219/0894

Abstract: A vacuum system trap characterised in that it comprises:

(A) cracking means; and
(B) cold walls adjacent thereto is disclosed.

A process for the removal of deleterious gas(es) from a vacuum chamber or line characterised in that it comprises cracking the gas(es) to a form having a higher sticking coefficient and condensing such gas(es) on a cold surface using such a trap is also disclosed.
Referring to the accompanying illustrative diagram, the present trap may comprise cracking means heated filament 22 and cold walls 26.
The present invention represents an advance over the prior art.

Abstract translation: 一种真空系统捕集阱，其特征在于它包括：（A）裂解装置; 和（B）相邻的冷壁。 ...从真空室或管线去除有害气体的方法，其特征在于，其包括将气体裂化成具有较高粘附系数的形式并将这种气体冷凝在 还公开了使用这种陷阱的冷表面。 参考附图，本捕集器可以包括加热的细丝22和冷壁26的破裂装置。本发明代表了现有技术的进步。