METHOD AND SYSTEM FOR THE DETERMINATION OF VOLUMES OF VACUUM CHAMBERS AND EQUILIBRIUM TIMES FOR A VACCUUM SYSTEM
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    发明申请
    METHOD AND SYSTEM FOR THE DETERMINATION OF VOLUMES OF VACUUM CHAMBERS AND EQUILIBRIUM TIMES FOR A VACCUUM SYSTEM 审中-公开
    用于确定真空系统的真空室和平衡时间的体积的方法和系统

    公开(公告)号:WO2015054044A3

    公开(公告)日:2015-08-06

    申请号:PCT/US2014058949

    申请日:2014-10-03

    Applicant: STC UNM

    CPC classification number: B23K10/006 B23K10/003 G01F17/00 G01F22/02 G04F13/06

    Abstract: Provided is a method for determining a volume, at room temperature, of a first chamber having an unknown volume that is in fluid communication through a controllable valve with a second chamber having an unknown volume. The method can include measuring, by a pressure sensor coupled to one of the first chamber and the second chamber, a first equilibrium pressure of a gas that was introduced into the second chamber in both the first chamber and the second chamber after equilibrium is reached; measuring, by the pressure sensor, a second equilibrium pressure of the gas that was introduced into the second chamber in both the first chamber and the second chamber after equilibrium is reached, wherein the first chamber comprises an object with a known volume therein; and determining the volume of the first chamber based on the first equilibrium pressure and the second equilibrium pressure.

    Abstract translation: 提供一种用于确定在室温下具有未知体积的第一腔室的体积的方法,所述第一腔室通过可控阀与具有未知体积的第二腔室流体连通。 该方法可以包括:通过与第一腔室和第二腔室中的一个连接的压力传感器测量在达到平衡之后在第一腔室和第二腔室中引入到第二腔室中的气体的第一平衡压力; 在达到平衡之后,通过压力传感器测量在第一腔室和第二腔室两者中引入到第二腔室中的气体的第二平衡压力,其中第一腔室包括其中具有已知体积的物体; 以及基于第一平衡压力和第二平衡压力确定第一腔室的容积。

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