公开(公告)号：EP1559124A4

公开(公告)日：2008-08-20

申请号：EP03778104

申请日：2003-11-05

Applicant: STEVENS INST TECHNOLOGY

Inventor： KUNHARDT ERICH ,  BECKER KURT

IPC: H01J17/00 ,  H01J20060101 ,  H01J7/24 ,  H01J17/04 ,  H01J37/32 ,  H01J61/28 ,  H05H1/24 ,  H05H1/46

CPC classification number: H01J37/32018 ,  H01J17/04 ,  H01J37/32036 ,  H01J37/32559 ,  H01J37/32623 ,  H01J2237/0206 ,  H05H1/2406 ,  H05H2001/2412

Abstract: A method and apparatus for stabilizing glow plasma discharges by suppressing the transition from glow-to-arc includes a perforated dielectric plate having an upper surface and a lower surface and a plurality of holes extending therethrough. The perforated dielectric plate is positioned over the cathode. Each of the holes acts as a separate active current limiting micro-channel that prevents the overall current density from increasing above the threshold for the glow-to-arc transition. This allows for a stable glow discharge to be maintained for a wide range of operating pressures (up to atmospheric pressures) and in a wide range of electric fields include DC and RF fields of varying strength.

Abstract translation: 一种用于通过抑制辉光至弧的转变来稳定辉光等离子体放电的方法和设备包括具有上表面和下表面以及延伸穿过其中的多个孔的穿孔电介质板。 多孔电介质板位于阴极之上。 每个孔充当独立的有源限流微通道，防止总体电流密度超过辉光至弧过渡的阈值。 这允许在宽范围的操作压力（高达大气压力）下维持稳定的辉光放电，并且在宽范围的电场中包括强度变化的DC和RF场。

公开(公告)号：WO2004044941A3

公开(公告)日：2004-08-12

申请号：PCT/US0335097

申请日：2003-11-05

Applicant: STEVENS INST TECHNOLOGY

Inventor： KUNHARDT ERICH ,  BECKER KURT

IPC: H01J20060101 ,  H01J7/24 ,  H01J17/00 ,  H01J17/04 ,  H01J37/32 ,  H01J61/28 ,  H05H1/24 ,  H05H1/46 ,  H01J17/49

CPC classification number: H01J37/32018 ,  H01J17/04 ,  H01J37/32036 ,  H01J37/32559 ,  H01J37/32623 ,  H01J2237/0206 ,  H05H1/2406 ,  H05H2001/2412

Abstract: A method and apparatus for stabilizing glow plasma discharges by suppressing the transition from glow-to-arc includes a perforated dielectric plate having an upper surface and a lower surface and a plurality of holes extending therethrough. The perforated dielectric plate is positioned over the cathode. Each of the holes acts as a separate active current limiting micro-channel that prevents the overall current density from increasing above the threshold for the glow-to-arc transition. This allows for a stable glow discharge to be maintained for a wide range of operating pressures (up to atmospheric pressures) and in a wide range of electric fields include DC and RF fields of varying strength.

Abstract translation: 通过抑制从辉光到电弧的转变来稳定辉光等离子体放电的方法和装置包括具有上表面和下表面的穿孔电介质板和延伸穿过其中的多个孔。 穿孔电介质板位于阴极上方。 每个孔用作单独的有源电流限制微通道，其防止总电流密度增加到辉光到电弧转变的阈值以上。 这允许在宽范围的工作压力（高达大气压力）下保持稳定的辉光放电，并且在宽范围的电场中包括具有不同强度的DC和RF场。

公开(公告)号：AU2003286888A1

公开(公告)日：2004-06-03

申请号：AU2003286888

申请日：2003-11-05

Applicant: STEVENS INST TECHNOLOGY

Inventor： KUNHARDT ERICH ,  BECKER KURT

IPC: H01J20060101 ,  H01J7/24 ,  H01J17/00 ,  H01J17/04 ,  H01J37/32 ,  H01J61/28 ,  H05H1/24 ,  H05H1/46

Abstract: A method and apparatus for stabilizing glow plasma discharges by suppressing the transition from glow-to-arc includes a perforated dielectric plate having an upper surface and a lower surface and a plurality of holes extending therethrough. The perforated dielectric plate is positioned over the cathode. Each of the holes acts as a separate active current limiting micro-channel that prevents the overall current density from increasing above the threshold for the glow-to-arc transition. This allows for a stable glow discharge to be maintained for a wide range of operating pressures (up to atmospheric pressures) and in a wide range of electric fields include DC and RF fields of varying strength.

公开(公告)号：CA2395180A1

公开(公告)日：2001-06-21

申请号：CA2395180

申请日：2000-12-15

Applicant: STEVENS INST TECHNOLOGY ,  PLASMASOL CORP

Inventor： CROWE RICHARD ,  CHRISTODOULATOS CHRISTOS ,  KUNHARDT ERICH ,  KORFIATIS GEORGE P

IPC: B01J19/08 ,  H05H1/24 ,  H05H1/34

Abstract: A plasma reactor (100) including a first dielectric (115) having at least on e capillary (146) defined therethrough, and a segmented electrode (140) including a plurality of electrode segments (140), each electrode segment (140) is disposed proximate an associated capillary (146). The reactor (100) may include a second electrode (120) and dielectric with the first and secon d dielectrics (115) separated by a predetermined distance to form a channel (125) therebetween into which the plasma exiting from the capillaries (146) in the first dielectric (115) is discharged. The fluid to be treated is passed through the channel (125) and exposed to the plasma discharge. The fluid to be treated may be exposed to the plasma discharge both in the capillaries (146) as well as in the channel (125) between the two dielectrics (115). The plasm a reactor (100) has a wide range of application, such as the destruction of pollutants in a fluid, the generation of ozone, the pretreatment of air for modifying or improving combustion, and the destruction of various organic compounds, and surface cleaning of objects.

公开(公告)号：CA2505267A1

公开(公告)日：2004-05-27

申请号：CA2505267

申请日：2003-11-05

Applicant: STEVENS INST TECHNOLOGY

Inventor： BECKER KURT ,  KUNHARDT ERICH

IPC: H01J20060101 ,  H01J7/24 ,  H01J17/00 ,  H01J17/04 ,  H01J37/32 ,  H01J61/28 ,  H05H1/24 ,  H05H1/46 ,  H01J17/49

Abstract: A method and apparatus for stabilizing glow plasma discharges by suppressing the transition from glow-to-arc includes a perforated dielectric plate havin g an upper surface and a lower surface and a plurality of holes extending therethrough. The perforated dielectric plate is positioned over the cathode . Each of the holes acts as a separate active current limiting micro-channel that prevents the overall current density from increasing above the threshol d for the glow-to-arc transition. This allows for a stable glow discharge to b e maintained for a wide range of operating pressures (up to atmospheric pressures) and in a wide range of electric fields include DC and RF fields o f varying strength.

公开(公告)号：BR0016773A

公开(公告)日：2002-09-03

申请号：BR0016773

申请日：2000-12-15

Applicant: STEVENS INST TECHNOLOGY ,  PLASMASOL LLC

Inventor： KORFIATS GEORGE P ,  KUNHARDT ERICH ,  CHRISTODOULATOS CHRISTOS ,  CROWE RICHARD

IPC: B01J19/08 ,  H05H1/24 ,  G01N21/73 ,  F41B6/00

Abstract: A plasma reactor including a first dielectric having at least one capillary defined therethrough, and a segmented electrode including a plurality of electrode segments, each electrode segment is disposed proximate an associated capillary. Each electrode segment may be formed in different shapes, for example, a pin, stud, washer, ring, or disk. The electrode segment may be hollow, solid, or made from a porous material. The reactor may include a second electrode and dielectric with the first and second dielectrics separated by a predetermined distance to form a channel therebetween into which the plasma exiting from the capillaries in the first dielectric is discharged. The fluid to be treated is passed through the channel and exposed to the plasma discharge. If the electrode segment is hollow or made of a porous material, then the fluid to be treated may be fed into the capillaries in the first dielectric and exposed therein to the maximum plasma density. The fluid to be treated may be exposed to the plasma discharge both in the capillaries as well as in the channel between the two dielectrics. The plasma reactor is more energy efficient than conventional devices and does not require a carrier gas to remain stable at atmospheric pressure. The plasma reactor has a wide range of application, such as the destruction of pollutants in a fluid, the generation of ozone, the pretreatment of air for modifying or improving combustion, and the destruction of various organic compounds, and surface cleaning of objects.