公开(公告)号：DE602005006161T2

公开(公告)日：2009-07-02

申请号：DE602005006161

申请日：2005-12-15

Applicant: STICHTING FUND OND MATERIAL

Inventor： KESSELS MARCUS JOZEF ,  VERHOEVEN JAN

IPC: G21K1/06

Abstract: Multi-layer mirror for radiation with a wavelength in the wavelength range between 0.1 nm and 30 nm, comprising a stack of thin films substantially comprising scattering particles which scatter the radiation, which thin films are separated by separating layers with a thickness in the order of magnitude of the wavelength of the radiation, which separating layers substantially comprise non-scattering particles which do not scatter the radiation, wherein the separating layers are covered on at least one side in each case by an intermediate layer of a material which can be mixed with the material of the thin films and the material of the separating layers.

公开(公告)号：DE602005006161D1

公开(公告)日：2008-05-29

申请号：DE602005006161

申请日：2005-12-15

Applicant: STICHTING FUND OND MATERIAL

Inventor： KESSELS MARCUS JOZEF ,  VERHOEVEN JAN

IPC: G21K1/06

Abstract: Multi-layer mirror for radiation with a wavelength in the wavelength range between 0.1 nm and 30 nm, comprising a stack of thin films substantially comprising scattering particles which scatter the radiation, which thin films are separated by separating layers with a thickness in the order of magnitude of the wavelength of the radiation, which separating layers substantially comprise non-scattering particles which do not scatter the radiation, wherein the separating layers are covered on at least one side in each case by an intermediate layer of a material which can be mixed with the material of the thin films and the material of the separating layers.