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公开(公告)号：DE60201599T2
公开(公告)日：2005-11-10
申请号：DE60201599
申请日：2002-05-21
Applicant: STICHTING FUND OND MATERIAL
Inventor： BIJKERK FREDERIK , LOUIS ERIC , KESSELS JOSEF , VERHOEVEN JAN , DEN HARTOG JOHANNES
IPC: G21K1/06
Abstract: Multi-layer mirror for radiation with a wavelength in the wavelength range between 0.1 nm and 30 nm (the so-called XUV range), comprising a stack of thin films substantially comprising scattering particles which scatter the radiation, which thin films are separated by separating layers with a thickness in the order of magnitude of the wavelength of the radiation, which separating layers substantially comprise non-scattering particles which do not scatter the radiation, wherein the non-scattering particles are substantially particles of lithium (Li), and method for manufacturing such a mirror.
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公开(公告)号：NL1018139C2
公开(公告)日：2002-11-26
申请号：NL1018139
申请日：2001-05-23
Applicant: STICHTING FUND OND MATERIAL
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公开(公告)号：NL2002287C
公开(公告)日：2010-06-07
申请号：NL2002287
申请日：2008-12-04
Applicant: STICHTING FUND OND MATERIAL
Inventor： VERHOEVEN JAN , VRAKKING MARCUS JOHANNES JACOBUS , JOHNSSON PER JEPPE
CPC classification number: G02B5/0891 , G21K1/062
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公开(公告)号：AT392701T
公开(公告)日：2008-05-15
申请号：AT05825377
申请日：2005-12-15
Applicant: STICHTING FUND OND MATERIAL
Inventor： KESSELS MARCUS , VERHOEVEN JAN
IPC: G21K1/06
Abstract: Multi-layer mirror for radiation with a wavelength in the wavelength range between 0.1 nm and 30 nm, comprising a stack of thin films substantially comprising scattering particles which scatter the radiation, which thin films are separated by separating layers with a thickness in the order of magnitude of the wavelength of the radiation, which separating layers substantially comprise non-scattering particles which do not scatter the radiation, wherein the separating layers are covered on at least one side in each case by an intermediate layer of a material which can be mixed with the material of the thin films and the material of the separating layers.
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公开(公告)号：DE602005006161D1
公开(公告)日：2008-05-29
申请号：DE602005006161
申请日：2005-12-15
Applicant: STICHTING FUND OND MATERIAL
Inventor： KESSELS MARCUS JOZEF , VERHOEVEN JAN
IPC: G21K1/06
Abstract: Multi-layer mirror for radiation with a wavelength in the wavelength range between 0.1 nm and 30 nm, comprising a stack of thin films substantially comprising scattering particles which scatter the radiation, which thin films are separated by separating layers with a thickness in the order of magnitude of the wavelength of the radiation, which separating layers substantially comprise non-scattering particles which do not scatter the radiation, wherein the separating layers are covered on at least one side in each case by an intermediate layer of a material which can be mixed with the material of the thin films and the material of the separating layers.
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Patent Agency Ranking
公开(公告)号：NL1027836C2
公开(公告)日：2006-06-22
申请号：NL1027836
申请日：2004-12-21
Applicant: STICHTING FUND OND MATERIAL
Inventor： KESSELS MARCUS JOZEF HENRICUS , VERHOEVEN JAN
IPC: G21K1/06
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公开(公告)号：AT279775T
公开(公告)日：2004-10-15
申请号：AT02736274
申请日：2002-05-21
Applicant: STICHTING FUND OND MATERIAL
Inventor： BIJKERK FREDERIK , LOUIS ERIC , KESSELS MARCUS JOSEF HENRICUS , VERHOEVEN JAN , DEN HARTOG MARKUS JOHANNES HAR
IPC: G21K1/06
Abstract: Multi-layer mirror for radiation with a wavelength in the wavelength range between 0.1 nm and 30 nm (the so-called XUV range), comprising a stack of thin films substantially comprising scattering particles which scatter the radiation, which thin films are separated by separating layers with a thickness in the order of magnitude of the wavelength of the radiation, which separating layers substantially comprise non-scattering particles which do not scatter the radiation, wherein the non-scattering particles are substantially particles of lithium (Li), and method for manufacturing such a mirror.
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公开(公告)号：NL2002287C2
公开(公告)日：2010-06-07
申请号：NL2002287
申请日：2008-12-04
Applicant: STICHTING FUND OND MATERIAL
Inventor： VERHOEVEN JAN , VRAKKING MARCUS JOHANNES JACOBUS , JOHNSSON PER JEPPE
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公开(公告)号：DE602005006161T2
公开(公告)日：2009-07-02
申请号：DE602005006161
申请日：2005-12-15
Applicant: STICHTING FUND OND MATERIAL
Inventor： KESSELS MARCUS JOZEF , VERHOEVEN JAN
IPC: G21K1/06
Abstract: Multi-layer mirror for radiation with a wavelength in the wavelength range between 0.1 nm and 30 nm, comprising a stack of thin films substantially comprising scattering particles which scatter the radiation, which thin films are separated by separating layers with a thickness in the order of magnitude of the wavelength of the radiation, which separating layers substantially comprise non-scattering particles which do not scatter the radiation, wherein the separating layers are covered on at least one side in each case by an intermediate layer of a material which can be mixed with the material of the thin films and the material of the separating layers.
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公开(公告)号：DE60201599D1
公开(公告)日：2004-11-18
申请号：DE60201599
申请日：2002-05-21
Applicant: STICHTING FUND OND MATERIAL
Inventor： BIJKERK FREDERIK , LOUIS ERIC , KESSELS JOSEF , VERHOEVEN JAN , DEN HARTOG JOHANNES
IPC: G21K1/06
Abstract: Multi-layer mirror for radiation with a wavelength in the wavelength range between 0.1 nm and 30 nm (the so-called XUV range), comprising a stack of thin films substantially comprising scattering particles which scatter the radiation, which thin films are separated by separating layers with a thickness in the order of magnitude of the wavelength of the radiation, which separating layers substantially comprise non-scattering particles which do not scatter the radiation, wherein the non-scattering particles are substantially particles of lithium (Li), and method for manufacturing such a mirror.
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