公开(公告)号：WO2010046724A1

公开(公告)日：2010-04-29

申请号：PCT/IB2008/003660

申请日：2008-10-22

Applicant: STMICROELECTRONICS (GRENOBLE) SAS ,  STMICROELECTRONICS S.R.L. ,  TENUCCI, Sergio ,  PAGANI, Alberto ,  SPINETTA, Marco ,  RANCHOUX, Bernard

Inventor： TENUCCI, Sergio ,  PAGANI, Alberto ,  SPINETTA, Marco ,  RANCHOUX, Bernard

IPC: G05B19/418 ,  G01R31/28

CPC classification number: G05B19/41875 ,  G01R31/2894 ,  Y02P90/22 ,  Y02P90/86

Abstract: The invention relates to a method for an improved checking of repeatability and reproducibility of a measuring chain, in particular for the quality control by means of the semiconductor device testing, wherein testing steps are provided for multiple and different devices to be subjected to measurement through a measuring system comprising at least one concatenation of measuring units between a testing apparatus (ATE) and each device to be subjected to measurement. Advantageously, the method comprises the following steps: checking repeatability and reproducibility of each type of unit that forms part of the measuring chain of the concatenation; then making a correlation between the various measuring chains as a whole to check repeatability and reproducibility, using a corresponding device subjected to measurement.

Abstract translation: 本发明涉及一种用于改进测量链的重复性和再现性检查的方法，特别是通过半导体器件测试进行质量控制的方法，其中为多个和不同的器件提供测试步骤以通过 测量系统包括测试装置（ATE）和待测量的每个装置之间的测量单元的至少一个级联。 有利地，该方法包括以下步骤：检查构成级联测量链的一部分的每种类型的单元的重复性和重复性; 然后在各测量链之间进行整体的相关性，以检查重复性和再现性，使用相应的测量装置。

公开(公告)号：EP2347310A1

公开(公告)日：2011-07-27

申请号：EP08875796.8

申请日：2008-10-22

Applicant: STMicroelectronics (Grenoble) SAS ,  STMicroelectronics S.r.l.

Inventor： TENUCCI, Sergio ,  PAGANI, Alberto ,  SPINETTA, Marco ,  RANCHOUX, Bernard

IPC: G05B19/418 ,  G01R31/28

CPC classification number: G05B19/41875 ,  G01R31/2894 ,  Y02P90/22 ,  Y02P90/86

Abstract: The invention relates to a method for an improved checking of repeatability and reproducibility of a measuring chain, in particular for the quality control by means of the semiconductor device testing, wherein testing steps are provided for multiple and different devices to be subjected to measurement through a measuring system comprising at least one concatenation of measuring units between a testing apparatus (ATE) and each device to be subjected to measurement. Advantageously, the method comprises the following steps: checking repeatability and reproducibility of each type of unit that forms part of the measuring chain of the concatenation; then making a correlation between the various measuring chains as a whole to check repeatability and reproducibility, using a corresponding device subjected to measurement.

公开(公告)号：EP2347310B1

公开(公告)日：2014-05-21

申请号：EP08875796.8

申请日：2008-10-22

Applicant: STMicroelectronics (Grenoble) SAS ,  STMicroelectronics Srl

Inventor： TENUCCI, Sergio ,  PAGANI, Alberto ,  SPINETTA, Marco ,  RANCHOUX, Bernard

IPC: G05B19/418 ,  G01R31/28

CPC classification number: G05B19/41875 ,  G01R31/2894 ,  Y02P90/22 ,  Y02P90/86