公开(公告)号：EP4428508A1

公开(公告)日：2024-09-11

申请号：EP24159086.8

申请日：2024-02-22

Applicant: STMicroelectronics International N.V.

Inventor： VERCESI, Federico ,  NICOLI, Silvia ,  DE MARCO, Cinzia

IPC: G01J5/02

CPC classification number: G01J5/024 ,  G01J5/023 ,  G01J5/0235 ,  G01J5/0225

Abstract: Disclosed herein are thermal sensor devices including TMOS devices with a mass (202) suspended over a cavity (198) by springs (201) extending between a frame (200) and the mass (202). The thermal sensor devices (100) include stoppers (141) that limit upward and/or downward movement of the springs (141) and therefore the mass (202). These stoppers (141) are formed from sidewalls (203) supporting a top cap (190) over the frame, springs, and mass. The stoppers are constructed by using various overlapping metal layers (130, 150, 170) during fabrication.