公开(公告)号：EP4428508A1

公开(公告)日：2024-09-11

申请号：EP24159086.8

申请日：2024-02-22

Applicant: STMicroelectronics International N.V.

Inventor： VERCESI, Federico ,  NICOLI, Silvia ,  DE MARCO, Cinzia

IPC: G01J5/02

CPC classification number: G01J5/024 ,  G01J5/023 ,  G01J5/0235 ,  G01J5/0225

Abstract: Disclosed herein are thermal sensor devices including TMOS devices with a mass (202) suspended over a cavity (198) by springs (201) extending between a frame (200) and the mass (202). The thermal sensor devices (100) include stoppers (141) that limit upward and/or downward movement of the springs (141) and therefore the mass (202). These stoppers (141) are formed from sidewalls (203) supporting a top cap (190) over the frame, springs, and mass. The stoppers are constructed by using various overlapping metal layers (130, 150, 170) during fabrication.

公开(公告)号：EP4467951A1

公开(公告)日：2024-11-27

申请号：EP24177856.2

申请日：2024-05-24

Applicant: STMicroelectronics International N.V.

Inventor： NICOLI, Silvia ,  ALLEGATO, Giorgio ,  DANIELE, Filippo ,  NOMELLINI, Andrea ,  TURI, Maria Carolina

IPC: G01L9/00 ,  G01L19/00 ,  G01L23/12

Abstract: MEMS pressure transducer (1) including: a semiconductor body (2); a lower dielectric region (4,6), arranged above the semiconductor body (2); a fixed electrode region (12) and a lower anchoring region (14), which are formed by conductive material, are arranged on the lower dielectric region (4,6) and are laterally separated from each other; a membrane (55) of conductive material, which is suspended above the fixed electrode region (12), so as to delimit a cavity (39) upwardly, the fixed electrode region (12) facing the cavity, the membrane (55) being deformable as a function of pressure and forming a variable capacitor together with the fixed electrode region (12); and an upper anchoring region (37") of conductive material, which laterally delimits the cavity (39) and is interposed, in direct contact, between the membrane (55) and the lower anchoring region (14).

公开(公告)号：EP4520715A1

公开(公告)日：2025-03-12

申请号：EP24195113.6

申请日：2024-08-19

Applicant: STMicroelectronics International N.V.

Inventor： NICOLI, Silvia ,  VARISCO, Igor ,  DANIELE, Filippo ,  TENTORI, Lorenzo ,  D'ERCOLI, Filippo ,  CAPRA, Federica

IPC: B81B3/00

Abstract: MEMS device including: a fixed body (14;400) delimiting a cavity (13;413); a suspended structure (27;427) extending cantilevered from the fixed body, above the cavity, and including a suspended semiconductive region (16;416); and a transducer (40) arranged above the suspended structure. The suspended structure further includes a compensation region (31) of thermal oxide, which extends below the suspended semiconductive region.