公开(公告)号：EP4467987A1

公开(公告)日：2024-11-27

申请号：EP24176349.9

申请日：2024-05-16

Applicant: STMicroelectronics International N.V.

Inventor： GARBARINO, Marco ,  GATTERE, Gabriele

IPC: G01P15/125 ,  G01P15/13 ,  G01P15/08

Abstract: A microelectromechanical accelerometer includes: a microstructure (2), having sensing terminals (11a, 11b) and driving terminals (12a, 12b) distinct from the sensing terminals (11a, 11b), a supporting body (4) and a movable mass (5), coupled to the supporting body (4) so as to be able to oscillate according to a sensing axis (X) with respect to a rest position, and a control unit (3). The movable mass (5) includes: a sensing structure (7) and a driving structure (10), respectively coupled to the sensing terminals (11a, 11b) and to the driving terminals (12a, 12b) through capacitive couplings (C S1 , C S2 , C D1 , C D2 ) variable as a function of displacements of the movable mass (5) from the rest position. The control unit (3) is coupled to the microstructure (2) so as to form a force feedback loop configured to maintain the movable mass (5) in the rest position. The sensing structure (7) and the driving structure (10) are electrically insulated and rigidly coupled with each other.