公开(公告)号：EP4480899A1

公开(公告)日：2024-12-25

申请号：EP24180148.9

申请日：2024-06-05

Applicant: STMicroelectronics International N.V.

Inventor： SEGHIZZI, Luca ,  VERCESI, Federico ,  LONGONI, Gianluca ,  NOMELLINI, Andrea

IPC: B81B7/02 ,  G01P5/00 ,  G01P15/08 ,  G01P15/09 ,  B81B7/00

Abstract: Inertial MEMS device (2) wherein an inertial element (35; 36), responsive to movement, has a movable structure (43; 44; 46) formed in a first structural layer (53) of semiconductor material. A suspended structure (57) extends above the movable structure (43; 44; 46), at a distance therefrom. The suspended structure (57) is formed in a second structural layer (54) of semiconductor material and carries a piezoelectric structure (56). The suspended structure (57) and the piezoelectric structure (56) form a wake-up element (10) configured to generate an activation signal (a1) in presence of vibrations or shocks. The inertial element (35) and the wake-up element (10) are contained in a chamber (93) formed by a substrate (50) and a cap (55), together with peripheral portions of the first and the second structural layers (53, 54).