公开(公告)号：EP3226058A1

公开(公告)日：2017-10-04

申请号：EP16190250.7

申请日：2016-09-22

Applicant: STMicroelectronics Ltd

Inventor： DUVDEVANY, Offir ,  SHARON, Dadi ,  SOURANI, Sason

IPC: G02B26/08 ,  G02B26/10 ,  B81B3/00

CPC classification number: G02B26/0833 ,  B81B3/0048 ,  G02B7/1821 ,  G02B26/0841 ,  G02B26/105 ,  G03B21/008

Abstract: The method for controlling an angular position of a MEMS mirror includes: applying a first driving moment to the MEMS mirror to generate a rotational scanning movement of the mirror; and, at a zooming instant, applying a second driving moment to the MEMS mirror, wherein the second driving moment is equal to the first driving moment plus an extra moment. The extra moment may be a DC offset. After a transient period of time from zooming instant, a third driving moment M 2 = k θ̇ 2 t is applied. The first and third driving moment are variable linearly with time. The driving moments are applied to torsional springs of the mirror.

Abstract translation: 用于控制MEMS反射镜的角位置的方法包括：向MEMS反射镜施加第一驱动力矩以产生反射镜的旋转扫描运动; 并且在变焦时刻向MEMS反射镜施加第二驱动时刻，其中第二驱动时刻等于第一驱动时刻加上额外时刻。 额外的时刻可能是直流偏移。 在从变焦瞬间过渡一段时间之后，施加第三个驱动时刻M2 =kθ̇2t。 第一和第三驱动时刻随时间线性变化。 驾驶时刻应用于镜子的扭转弹簧。