公开(公告)号：EP1475642B1

公开(公告)日：2006-07-19

申请号：EP03425282.5

申请日：2003-05-02

Applicant: STMicroelectronics S.r.l.

Inventor： Bortesi, Luca ,  Vendrame, Loris ,  Bogliolo, Alessandro

IPC: G01R27/26

CPC classification number: G01R27/2605 ,  G01R31/026 ,  G01R31/2853

公开(公告)号：EP1475642A1

公开(公告)日：2004-11-10

申请号：EP03425282.5

申请日：2003-05-02

Applicant: STMicroelectronics S.r.l.

Inventor： Bortesi, Luca ,  Vendrame, Loris ,  Bogliolo, Alessandro

IPC: G01R27/26

CPC classification number: G01R27/2605 ,  G01R31/026 ,  G01R31/2853

Abstract: A method and a corresponding arrangement for measuring the coupling capacitance between two interconnect lines exploits the so-called cross-talk effect and keeps an interconnect line at a constant reference voltage. The method and arrangement solve the problem of short-circuit currents that affects the known test structures, and allow a direct measurement of the coupling capacitance between the two interconnect lines.
Capacitance measurements may also be used for determining points of interruption of interconnect lines. When a line is interrupted, the measured coupling capacitance is the capacitance of a single conducting branch. The position of points of interruption of an interconnect line is determined by measuring the coupling capacitance of all segments of the line with a second conducting line.

Abstract translation: 一种用于测量两条互连线之间的耦合电容的方法和相应的装置利用了所谓的串扰效应，并在一定的基准电压互连线保持。 该方法和装置解决的短路电流的故障确实影响了已知的测试结构，并允许两条互连线之间的耦合电容的直接测量。 因此电容测量可以用于互连线中断的确定性挖掘点。 当线被中断时，所测量的耦合电容是单个导电支路的电容。 互连线的中断的点的位置是确定的，通过测量线的所有段的耦合电容与第二导线开采。